Lg Display Co., Ltd.

Konkuk University Industrial Cooperation Corp

Jin-Hyun Ahn

Young-Sup Jung

Jun-Hee Lee

Yun Shick Eom

Kee-Hyun Shin

Hyun-Kyoo Kang

A method of fabricating an array substrate includes: forming a line or an electrode on a substrate on which a pixel region is defined, forming a protection layer on the line or the electrode, the protection layer formed of silicon nitride (SiN), forming photoresist patterns on the protection layer, and loading the substrate having the photoresist pattern into a chamber of a dry etching apparatus, and performing a first dry etching process on the protection layer exposed between the photoresist patterns using a first gas mixture containing nitrogen trifluoride (NF) gas to form a contact hole exposing the line or the electrode.

Method of fabricating array substrate using dry etching process of silicon nitride

A system and a method for mass production of Dye-Sensitized Solar Cells at low cost via a continuous roll-to-roll process. While a flexible conductive substrate is constantly in transit on a conveyor, a titanium dioxide (TiO) layer is: formed by spray printing; sintered; dyed in a dye tank, with or without immersion, by a dye solution sprayed from nozzles while the substrate moves along a conveyor line configured as multiple alternating U-shaped lines; washed and dried; loaded with a gel-type electrolyte by roll-type printing; and covered and pressure-sealed by another flexible conductive substrate, aided by preloaded sealants. The dye solution in the dye tank may be re-circulated, during which process, the temperature, level, concentration of the dye solution may be adjusted and controlled. The roll-to-roll production process may further include erecting anti-leakage walls and leveling the electrolyte layer for preventing post-sealing leakage of the electrolyte.

System and method for producing flexible dye-sensitized solar cells by a roll-to-roll printing process

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Seoul, South Korea

Jin-Hyun Ahn