Samsung Electronics Co., Ltd.

Samyoung Pure Chemicals Co., Ltd.

Jin-Hye Bae

Won-Jun Lee

Hoon Hee Han

Ho-Young Kim

Jung-Ig Jeon

Chang-Kyu Lee

Geun-Joo Baek

Sung-Yoon Chung

Keum-Joo Lee

Dae-Keun Kang

Taek-Dong Chung

A composition for cleaning a magnetic pattern, a method of manufacturing a magnetic memory device, a method of forming a magnetic pattern, and a magnetic memory device, the composition including a glycol ether-based organic solvent; a decomposing agent that includes an aliphatic amine; and at least one of a chelating agent, or a cleaning accelerator that includes an organic alkaline compound, wherein the composition is devoid of water.

Composition for cleaning magnetic patterns

Method of forming magnetic patterns, and method of manufacturing magnetic memory devices

In a method of detecting an etch by-product, the method including forming a magnetic layer including palladium (Pd) on a substrate; etching the magnetic layer to form a magnetic layer pattern; depositing a mixture including an alkyl bromide compound on a surface of the magnetic layer pattern; and measuring a current difference between the substrate and the mixture to detect an etch by-product on the surface of the magnetic layer pattern.

Methods of detecting an etch by-product and methods of manufacturing a magnetoresistive random access memory device using the same

The present invention provides methods of cleaning a semiconductor device by removing contaminants, such as particles and/or etching by-products, from a structure of a semiconductor device using a first cleaning solution including a mixture of ammonium hydroxide (NHOH), hydrogen peroxide (HO) and deionized (DI) water, and a second cleaning solution including ozone (O) water. The present invention also provides methods of manufacturing a semiconductor device using these methods of cleaning the semiconductor device.

Methods of cleaning a semiconductor device and methods of manufacturing a semiconductor device using the same

Growing community of inventors

Suwon-si, South Korea

Jin-Hye Bae