Hzo, Inc.

Jim Dempster

Max Ernest Sorenson

Yang Yun

Tining Su

Alex L Anderson

Layton Baker

Chien-Lan Hsueh

A modular multilayer deposition system includes a plurality of modular deposition chambers, including at least one parylene deposition chamber and at least one ALD deposition chamber. The parylene deposition chamber is connected in series with the ALD deposition chamber. Substrates are automatically moved from within the parylene deposition chamber to within the ALD deposition chamber or from within the ALD deposition chamber to the parylene deposition chamber.

Growing community of inventors

Reno, NV, United States of America

Jim Dempster