Mykrolis Corporation

Jill Boski

John E Pillion

Michael E Clarke

A process for coating a solid surface ( ) with a conditioned liquid composition of substantially uniform thickness is provided. A liquid composition is conditioned by a) degassing either via vacuum or by sparging with a high kinematic viscosity gas; and b) substantially maintaining the viscosity of the liquid composition. The conditioned liquid may then be dispensed onto a solid surface ( ) positioned in a sub-atmospheric environment ( ) or in a helium-rich environment ( ). The solid surface ( ) is rotated so that the liquid composition forms a uniformly thick coating free from bubbles on the solid surface ( ) and thereby produces a thin film of uniform thickness.

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Northampton, MA, United States of America

Jill Boski