Samsung Electronics Co., Ltd.

Jiho Uh

Hyunsoo Chun

Dongwoo Wi

Kwangyoung Jung

Donghoon Han

Jinseok Lee

Seoyoung Maeng

Jongyong Bae

Hongtaek Lim

Minjoon Kim

Donghoon Park

Chungho Cho

Kihong Cho

Byounghoon Ji

WonHee Yoon

Jung-Soon Bok

Hyungho Kim

Kangmin Park

Jungsoo Son

Kyoungok Kim

Wonhee Park

Jaeo Ryu

Sunhwan Park

Hyunjoon Ohn

Namki Cho

Kyuchul Shim

Provided is a plasma generating system including: a resonant inverter including a switching circuit and configured to generate a device output current and a device output voltage, and to have a switching frequency based on an input DC current and an input DC voltage; a plasma source configured to generate a plasma based on the device output current and the device output voltage; a controller configured to control the switching frequency of the resonant inverter based on a value of the input DC current, a value of the input DC voltage, a value of the device output current, and a value of the device output voltage; and a junction temperature estimator configured to: estimate a current output from the switching circuit based on the value of the input DC voltage, the value of the device output current, and the value of the device output voltage, generate an inverted current estimate value, and estimate a junction temperature of the switching circuit based on the inverted current estimate value.

Junction temperature estimation device and plasma generating system including the same

A process chamber door for closing or opening an entrance of a process chamber through which a substrate to be process is loaded includes a seal plate including a front surface and a rear surface opposite to each other in a first direction, a connection block connected to the rear surface of the seal plate and including a central portion and two side portions connected to the rear surface of the seal plate, and a shaft connected to the central portion of the connection block. The connection block includes a first hinge groove and a second hinge groove. The first hinge groove is exposed at a bottom surface and a side surface of the connection block and the second hinge groove is exposed at an upper surface and the side surface of the connection block.

Valve structure and substrate processing apparatus including the same

A pH monitoring system includes a first pipe, and a second pipe and a third pipe each branched from the first pipe, a drain connected to the third pipe, a sensor module connected to the second pipe, the sensor module including an inlet valve connected to the second pipe, an outlet valve connected to the drain, and a chamber configured to receive a chemical liquid therein, and a pH sensor mountable to the sensor housing. The sensor module is disposed in parallel to the third pipe.

PH monitoring systems having sensor modules

A substrate processing apparatus including an electrostatic chuck on which a substrate is mountable; a ring surrounding the electrostatic chuck, the ring including a first coupling groove; and a first floating electrode in the first coupling groove of the ring, the first floating electrode having a ring shape, wherein a top surface of the first floating electrode is exposed at the ring, and the first floating electrode has a tapered shape including an inclined surface that is inclined in a downward direction toward the electrostatic chuck.

Substrate processing apparatus

A vacuum chuck includes a pedestal including a first surface on which a substrate may be mounted. The first surface of the substrate may include a vacuum hole to provide a vacuum pressure below the substrate, a vacuum groove connected to the vacuum hole, and a gas hole surrounding the vacuum groove to transmit a bottom gas to the substrate. A vacuum pipe may be provided to connect to the vacuum hole, and a gas pipe may be provided to connect to the gas hole. The diameter of the vacuum hole may be about 2 to about 3 micrometers, and a width of the vacuum groove may be about 1.6 to about 2.5 micrometers.

Vacuum chuck, substrate processing apparatus including the same and related method of manufacture

Growing community of inventors

Seoul, South Korea

Jiho Uh