United Microelectronics Corp.

Powerchip Semiconductor Manufacturing Corporation

Promos Technologies, Inc

Ememory Technology Inc.

Jih-Wen Chou

Tony Lin

Wen-Kuan Yeh

Coming Chen

Jemmy Wen

Tung-Po Chen

Yu-Jen Huang

Hsin-Hong Chen

Shih-Wei Sun

Hwi-Huang Chen

Chih-Hsun Chu

Po-Hsien Yeh

Chih-Hung Lu

Robin Christine Hwang

Ching-Hsiang Hsu

Cheng-Tung Huang

Yung-Chang Lin

Yi-Chung Sheng

Chih-hsun Chu

Yu-Chi Chen

Tien-Hao Tang

Chen-Chiu Hsue

Ching-Sung Yang

Shiao-Shien Chen

Meng-Jin Tsai

Cheng-Han Huang

Mu-Chun Wang

Chia-Hao Chang

Cheng-Hui Chung

C C Hsue

Bo-An Tsai

Ching-Hua Chen

Shih-Chieh Pu

Yao-Chin Cheng

Chin-Lai Chen

Chung-Chiang Lin

Chung-Yi Chen

Bing-Chen Ji

Jung-Chun Lin

Alice Chao

Chih-Chung Tai

Shun-Tsung Yu

Zheng-Chang Mu

Ming-Yuan Lin

Hsiu-Chuan Shu

Frank Chen

Han-Chao Lai

The disclosure provides a semiconductor structure and a method of forming the same. The semiconductor structure includes a base pattern including a channel region and a drain region, a first semiconductor layer on the channel region of the base pattern, and a gate structure on the first semiconductor layer. The gate structure includes a first stack disposed on the first semiconductor layer and a second stack disposed on the first stack. The first stack includes a first sidewall adjacent to the drain region and a second sidewall opposite to the first sidewall in a first direction parallel to a top surface of the base pattern. The first sidewall is at a first distance from the second stack in the first direction, and the second sidewall is at a second distance from the second stack in the first direction. The first distance is greater than the second distance.

Semiconductor structure and method of forming the same

A high electron mobility transistor device including a channel layer, a first barrier layer, a gate structure, and a spacer is provided. The first barrier layer is disposed on the channel layer. The gate structure is disposed on the first barrier layer. The gate structure includes a first P-type gallium nitride layer, a second barrier layer, and a second P-type gallium nitride layer. The first P-type gallium nitride layer is disposed on the first barrier layer. The second barrier layer is disposed on the first P-type gallium nitride layer. The second P-type gallium nitride layer is disposed on the second barrier layer. A width of the second P-type gallium nitride layer is smaller than a width of the first P-type gallium nitride layer. The spacer is disposed on a sidewall of the second P-type gallium nitride layer.

High electron mobility transistor device and manufacturing method thereof

A high electron mobility transistor device including a channel layer, a first barrier layer, and a P-type gallium nitride layer is provided. The first barrier layer is disposed on the channel layer. The P-type gallium nitride layer is disposed on the first barrier layer. The first thickness of the first barrier layer located directly under the P-type gallium nitride layer is greater than the second thickness of the first barrier layer located on two sides of the P-type gallium nitride layer.

A GaN device with Npre-treatment is provided in the present invention, including a GaN substrate, an AlGaN layer covering the GaN substrate, a p-GaN gate on the AlGaN layer, a TiN electrode on the p-GaN gate, a first dielectric layer on the AlGaN layer surrounding the p-GaN gate, wherein a horizontal spacing is between the first dielectric layer and the p-GaN gate, and an interface between the AlGaN layer and the GaN substrate not covered by the first dielectric layer is subject to Npre-treatment, and a second dielectric layer covering on and directly contacting the exposed first dielectric layer, AlGaN layer, p-GaN gate and TiN electrode.

GaN device with N2 pre-treatment and method of performing Npre-treatment

A HEMT device including a substrate structure, a channel layer, a barrier layer, a gate electrode, a drain electrode, a first source field plate, a second source field plate, and a dielectric structure is provided. The first source field plate extends from the second side of the gate electrode to the first side of the gate electrode. The second source field plate is located on the first side of the gate electrode and is located between the drain electrode and the first source field plate. There is a gap between the first source field plate and the second source field plate. The first source field plate has an end adjacent to the gap. The thickness of the dielectric structure located directly below the second source field plate is greater than the thickness of the dielectric structure located directly below the end of the first source field plate.

An integrated circuit including a substrate, a first semiconductor element, and a second semiconductor element is provided. The substrate has a high voltage region and a low voltage region separated from each other. The first semiconductor element is located in the high voltage region. The first semiconductor element includes a first oxide layer and a first gate. The first oxide layer is embedded in the substrate. The first gate is located on the first oxide layer. The first gate is a polycrystalline gate. The second semiconductor element is located in the low voltage region. The second semiconductor element includes a second oxide layer and a second gate. The second oxide layer is embedded in the substrate. The second gate is located on the second oxide layer. The second gate is a metal gate. A manufacturing method of an integrated circuit is also provided.

Integrated circuit and method of manufacturing same

A non-volatile memory device includes a substrate, a stacked structure, an anti-fuse gate, a gate dielectric layer, a first doping region, and a second doping region. The stacked structure is formed on the substrate and includes a floating gate, a select logic gate, a logic gate dielectric layer, and an inter-polysilicon layer dielectric layer. The select logic gate is disposed on the floating gate, the logic gate dielectric layer is disposed between the floating gate and the substrate, and the inter-polysilicon layer dielectric layer is disposed between the floating gate and the select logic gate. The anti-fuse gate is disposed on the substrate, and the gate dielectric layer is disposed between the anti-fuse gate and the substrate. The first doping region is formed in the substrate at one side of the floating gate. The second doping region is formed in the substrate between the floating gate and the anti-fuse gate.

Non-volatile memory device and manufacturing method thereof

A method of fabricating a recess channel transistor is provided. First, a hard mask is formed on a doped-semiconductor layer and a substrate. The doped-semiconductor layer and the substrate are etched to form a trench and define a source/drain in the doped-semiconductor layer. An implantation process is performed with a tilt angle on sidewalls of the trench to form an implant area. A thermal oxidation process is performed to form an oxide layer. The oxide layer comprises a first thickness on the source/drain in the sidewalls of the trench and a second thickness on the other portion in the sidewalls of the trench.

Method of fabricating a recess channel transistor

A manufacturing method of metal oxide semiconductor transistor is provided. A substrate is provided. A source/drain extension region is formed in the substrate. A pad material layer with low dielectric constant is formed on the substrate. A trench is formed in the substrate and the pad material layer. A gate dielectric layer is formed on the surface of the substrate in the trench. A stacked gate structure is formed in the trench, wherein the top surface of a conductive layer of the stacked gate structure is higher than the surface of the pad material layer. A spacer material layer is formed conformably on the substrate. Portions of the spacer material layer and the pad material layer are removed so as to form a pair of first spacers and a pair of pad blocks. A source/drain is formed on the substrate beside the stacked gate structure.

Fabrication method of metal oxide semiconductor transistor

A semiconductor device is provided. The semiconductor device has a gate structure, a source region, a drain region, and a pair of dielectric barrier layers. The gate structure is formed on a substrate. The source region and the drain region are formed in the substrate next to the gate structure, and a channel region is formed between the source region and the drain region underneath the gate structure. The pair of dielectric barrier layers is respectively formed in the substrate underneath the gate structure between the source region and the drain region. The dielectric barrier layers are used for reducing the drain induced barrier lowering effect in a nanometer scale device.

Semicondutor device and manufacturing method thereof

A dynamic random access memory (DRAM) is provided. The dynamic random access memory includes a deep trench capacitor disposed in a first trench of a substrate, a conductive layer disposed in a second trench of the substrate, a gate structure, and a conductive layer disposed on the surface of the substrate at two sides of the gate structure. The depth of the second trench is smaller than the depth of the first trench, and the second trench partially overlaps with the first trench. The conductive layer disposed in the second trench is electrically connected with the conductive layer of the deep trench capacitor. The gate structure is disposed on the substrate. The conductive layer at one side of the gate structure is electrically connected with the conductive layer disposed in the second trench.

Dynamic random access memory device

A method for writing a memory module includes providing a plurality of memory cells, applying a first transmission line voltage to the first transmission line of the column of a memory cell, turning on a P-type channel of a memory cell between the memory cell to be written and the first transmission line of the column of the memory cell, turning off the P-type channel of at least one memory cell between the memory cell and the second transmission line of the column of the memory cell, applying a word line voltage to a word line connected to the memory cell, in order to inject hot electrons on a junction between the substrate and the first P-type doped region of the memory cell into a silicon nitride layer of the memory cell using band-to-band tunneling injection, and applying a substrate voltage to the substrates of the plurality of memory cells.

Method for operating a NAND-array memory module composed of P-type memory cells

A method for programming PMOS single transistor flash memory cells through channel hot carrier induced hot electron injection mechanism is disclosed. The PMOS single transistor flash memory cell includes an ONO stack layer situated on an N-well of a semiconductor substrate, a P poly gate formed on the ONO stack layer, a P doped source region disposed in the N-well at one side of the gate, and a P doped drain region disposed in the N-well at the other side of the gate. The method includes the steps of: applying a word line voltage V on the P poly gate, applying a source line voltage V on the source, wherein the source line voltage V is greater than the word line voltage V , thereby providing adequate bias to turn on the P channel thereof. A bit line voltage that is smaller than the source line voltage V is applied on the P doped drain region, thereby driving channel hot holes to flow toward the P doped drain region and then inducing hot electron injection near the drain side. A well voltage V is applied to the N-well, wherein V &equals;V .

Method for programming, erasing and reading a flash memory cell

A wafer has a substrate defined with a first region and a second region. An ONO layer, a first silicon layer, and a silicon nitride layer are formed on the substrate in sequence. Then the ONO layer, the first silicon layer, and the silicon nitride layer disposed on the second region are removed. At least one gate oxide layer is formed on the second region and a second silicon layer is deposited on the wafer. After that, a photo-etching process is performed to remove the second silicon layer and the silicon nitride layer on the first region. At least a third silicon layer is formed on the wafer. Photo-etching processes and a plurality of ion implantation processes are then performed to form a gate, a drain, and a source of each MOS transistor on the substrate.

Method of forming an embedded memory including forming three silicon or polysilicon layers

A MOS transistor includes a substrate, an insulation layer, a gate and a dielectric layer. The substrate includes a drain and a source separately positioned on the surface of the substrate. The insulation layer is positioned on the surface of the substrate between the drain and the source. The gate includes a conducting layer positioned on the insulation layer having a bottom side, a top side, a left side and a right side, and a metallic silicide layer positioned on the top side of the conducting layer wherein the width of the metallic silicide layer is greater than that of the bottom side of the conducting layer. The dielectric layer covers the drain, the source and the metallic silicide layer. The transistor includes at least one empty side slot positioned between the dielectric layer and the left side or right side of the conducting layer below the metallic silicide layer.

MOS transistor with two empty side slots on its gate and its method of formation

Growing community of inventors

Hsinchu, Taiwan

Jih-Wen Chou