Entegris, Inc.

Jieh Hwa Shyu

Craig L Brodeur

Qunwei Wu

John E Pillion

A device and method for increasing the mass transport rate of a chemical or electrochemical process at the solid and fluid interface in a fluid cell. The device includes a membrane in close contact with surface of the work piece, to separate the process cell into two chambers, so that fluid velocity at the work piece is controlled separately from the main cell flow. Thus the diffusion boundary layer is controlled and minimized by the rate that fluid is withdrawn from the work piece chamber.

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Andover, MA, United States of America

Jieh Hwa Shyu