Entegris, Inc.

Mykrolis Corporation

Jieh-Hwa Shyu

Craig L Brodeur

J Karl Niermeyer

Robert F McLoughlin

John E Pillion

Marc Brian Laverdiere

Christopher J Wargo

William Basser

Brett Belongia

Alketa Gjoka

Jijun Ge

Zhen Wu Lin

Saksatha Ly

Qunwei Wu

Bipin S Parekh

Eric McNamara

Peter V Kimball

Alicia Briggs LaForge

Versions of the invention include compositions and methods for making them that include a polymeric porous membrane with one or more atmospheric pressure microwave plasma modified surfaces. The modified porous membrane is stable, non-dewetting, and retains its mechanical strength.

Atmospheric pressure microwave plasma treated porous membranes

Embodiments disclosed herein provide restrictive-flow flow measurement devices, valve improvements and signal control devices and processes that control the flow of liquids, including control processes for single-liquid calibration. In some embodiments, a fluid flow device can be calibrated using a single standard calibration fluid. The fluid flow of a first fluid through a flow meter is measured by calculating a first pressure difference between pressures sensed by two pressure sensors of the flow meter. The fluid flow of a second fluid through the flow meter is measured by calculating a second pressure difference between pressures sensed by the same two pressure sensors. A calibration coefficient is determined based upon the relationship between the flow rate, the fluid density and the calculated pressure difference for the first and second fluids. A relationship between the calibration coefficient and the kinematic viscosity of each fluid is then determined and stored.

Fluid flow measuring and proportional fluid flow control device

One embodiment of the present invention can include a flow control device that comprises an inlet, an outlet in fluid communication with the inlet, a pressure sensor, which may or may not be the only pressure sensor of the fluid control device, and a controller coupled to the pressure sensor. The controller can be configured to generate a valve control signal based on a measured pressure at a single pressure sensor.

System and method for flow monitoring and control

One embodiment of the present invention can include a flow control device a flow control device that comprises an inlet, an outlet in fluid communication with the inlet, a pressure sensor, which may or may not be the only pressure sensor of the fluid control device, and a controller coupled to the pressure sensor. The controller can be configured to generate a valve control signal based on a measured pressure at a single pressure sensor.

One embodiment of the present invention can include a flow control device comprising an inlet, an outlet, a pressure loss element between the inlet and outlet, a pressure sensor located upstream from the constriction configured to measure a first pressure of a fluid flowing through the flow control device, a pressure sensor located downstream from the constriction, configured to measure a second pressure of the fluid flowing through the flow control device; and a controller coupled to the first pressure sensor and the second pressure sensor to generate a valve drive signal. The controller can generate a valve control signal based on a differential between the first pressure and the second pressure during a first mode of operation. The controller can also generate a valve control signal based on a measured pressure at a particular pressure sensor during a second mode of operation. The mode of operation can automatically switch.

Embodiments disclosed herein provide restrictive-flow flow measurement devices, valve improvements and signal control devices and processes that control the flow of liquids, including control processes for single-liquid calibration. In some embodiments, a valve can be adjusted by application of fuzzy logic which involves quantizing input variables into the degree to which a small set of logical values is true. In one embodiment, variables related to flow rate and change in flow rate over time can be compared to membership functions to generate fuzzy inputs, based upon which fuzzy outputs can be generated.

A contactor for effecting passage through a membrane from a first fluid a second fluid is provided. A cylindrical pleated membrane cartridge is positioned within a housing having a first inlet and a first outlet from a first fluid and at lest a second outlet for a second fluid. At least one baffle is positioned within a first flow path for the first fluid.

Pleated construction for effecting gas transfer membrane

The present invention is directed to an apparatus for combining a component from a fluid composition with a reactive fluid. The apparatus includes a hollow fiber contactor () having a plurality of hollow fibers contained within a housing. A reactive fluid (), which may be on the shell or lumen side of the hollow fiber membrane, is included in the apparatus and is used for combining with a component from a fluid composition which is on the opposite side of the membrane from the reactive liquid. The reactive liquid combines with one or more components from the fluid composition and can be used for purification of the fluid composition or for the preparation of chemical reagents.

Method and apparatus for treating fluids

The present invention provides restrictive-flow flow measurement devices, valve improvements and signal control devices and processes that control the flow of liquids, including control processes for single-liquid calibration.

This invention relates to an apparatus for conditioning the temperature of a fluid by utilizing a thermoplastic heat exchanger () comprised of a plurality of hollow tubes. The apparatus controls the temperature of a process fluid inside the heat exchanger () via a controller () by adjustment of a control valve () that regulates the flow of an exchange fluid. The apparatus can be used to maintain the temperature of a chemical bath () and also to prepare discreet dispensed volumes of temperature controlled liquid.

Apparatus for conditioning the temperature of a fluid

The present invention provides a system and method for selectively removing one or more organic and inorganic and also preferably one or more inorganic contaminants from plating baths. More particularly, the invented method relates to the use of a source of energy in combination with chemical oxidants, alone or in conjunction with a catalyst to oxidize organic contaminants in the plating bath to a level such that the electroplating bath can be recovered and reused after appropriate chemical adjustment. The oxidative treatment method may be a continuous process or a batch process that is performed in a single pass. Residual organics, if desired and chloride ions in the bath are removed from the solution by a chemisorption or physisorption treatment. Inorganic contaminants are removed from the electroplating bath by selective ion exchange resins or electrodialysis, while particulate and suspended colloidal particles are removed by filtration before the treated plating bath is recycled.

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Andover, MA, United States of America

Jieh-Hwa Shyu