Changxin Memory Technologies, Inc.

Beijing Superstring Academy of Memory Technology

Jiefang Deng

Xiaoguang Wang

Huihui Li

Dinggui Zeng

Kanyu Cao

Wei Chang

Xiang Liu

Jong Sung Jeon

The present disclosure relates to a semiconductor structure and a manufacturing method thereof. The semiconductor structure includes: a substrate, having a first surface; a plurality of memory cells, located on the first surface of the substrate and arranged according to a first preset pattern; and a plurality of memory contact structures, corresponding to the memory cells in a one-to-one manner, where bottom portions of the memory contact structures are in contact with top portions of the memory cells, and top portions of the memory contact structures are arranged according to a second preset pattern. The bottom portion of the memory contact structure is arranged opposite to the top portion of the memory contact structure.

Geometric semiconductor memory structure and manufacturing method thereof

Embodiments of the present application relate to a resistive memory device and a preparation method thereof. The preparation method includes: providing a base; forming bit line trenches in the base; forming a resistive material layer on a sidewall and the bottom of the bit line trench; and forming a bit line structure in the bit line trench through filling, wherein a variable resistor structure includes the bit line structure and the resistive material layer.

Resistive memory device and preparation method thereof

A method for manufacturing a semiconductor structure, a semiconductor structure and a semiconductor memory are provided. The method includes: providing a substrate; forming an MTJ structure and a first mask structure sequentially on the substrate; patterning the first mask structure to form a first pattern extending in a first direction; forming a second mask structure on the first pattern; patterning the second mask structure to form a second pattern extending in a second direction, in which the first direction intersects the second direction, and is not perpendicular to the second direction; patterning the first pattern by utilizing the second pattern to form a cellular pattern; and transferring the cellular pattern to the MTJ structure to form a cellular MTJ array.

Method for manufacturing semiconductor structure, semiconductor structure, and semiconductor memory

The present disclosure relates to a semiconductor structure and a manufacturing method thereof, including: a substrate; a plurality of transistors, arranged based on a first preset pattern; a plurality of transistor contact structures, corresponding to the transistors, the bottom portions of the transistor contact structures are arranged based on the first preset pattern, and top portions of which are arranged based on the shape of a regular hexagon; a plurality of memory cells, corresponding to the transistor contact structures, the memory cells are arranged based on the shape of a regular hexagon; and a plurality of memory contact structures, corresponding to the memory cells, the bottom portions of the memory contact structures are arranged based on the shape of a regular hexagon, top portions of which are arranged based on a second preset pattern, and the second preset pattern is different from the first preset pattern.

Semiconductor structure and manufacturing method thereof

The present disclosure provides a semiconductor structure, a method of reading data from the semiconductor structure, and a method of writing data into the semiconductor structure. The semiconductor structure includes: a memory matrix, including a plurality of magnetic storage domains arranged in a staggered manner and including a first end, a second end, and an intermediate portion; and a reading and writing circuit, connected to the intermediate portion of the memory matrix and configured to write data into the magnetic storage domains and read data from the magnetic storage domains.

Semiconductor structure, method of reading data from semiconductor structure, and method of writing data into semiconductor structure

A method for manufacturing a semiconductor structure includes the following: providing a substrate; forming an MTJ structure and a first mask structure in sequence on the substrate; performing a patterning process on the first mask structure to form a first pattern extending in a first direction; transferring the first pattern to the MTJ structure; forming a second mask structure on the MTJ structure; performing a patterning process on the second mask structure to form a second pattern extending in a second direction, the first direction intersecting the second direction and being not perpendicular to the second direction; and performing a patterning process on the MTJ structure by utilizing the second pattern to form a cellular MTJ array, the first pattern and the second pattern together forming a cellular pattern.

Method for manufacturing semiconductor structure, semiconductor structure and semiconductor memory

The present disclosure relates to a semiconductor structure and a manufacturing method thereof. The semiconductor structure includes a transistor; a first phase change memory structure, a bottom electrode of the first phase change memory structure being electrically connected to a first terminal (source or drain) of the transistor; a second phase change memory structure, a top electrode of the second phase change memory structure being electrically connected to the first terminal of the transistor; a first bit line, electrically connected to a top electrode of the first phase change memory structure; and a second bit line, electrically connected to a bottom electrode of the second phase change memory structure.

The present disclosure relates to a semiconductor structure and a manufacturing method thereof. The semiconductor structure includes: a substrate; a transistor, including a control terminal, a first terminal, and a second terminal; a first magnetic memory structure, a bottom electrode of which is electrically connected to the first terminal of the transistor; a second magnetic memory structure, a top electrode of which is electrically connected to the first terminal of the transistor, the bottom electrode of the first magnetic memory structure is located in a same layer with a bottom electrode of the second magnetic memory structure; a first bit line, electrically connected to a top electrode of the first magnetic memory structure; a second bit line, electrically connected to the bottom electrode of the second magnetic memory structure; and a selection line, electrically connected to a second terminal of the transistor.

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Hefei, China

Jiefang Deng