Seagate Technology Incorporated

University of Minnesota

Jianxin Zhu

Lance Eugene Stover

Joel William Hoehn

Lin Zhou

Dale E Egbert

Huiwen Liu

Jonathan Arland Nelson

Brian William Karr

Kevin Jon Schulz

David Allen Sluzewski

Zine-Eddine Boutaghou

Wayne Allen Bonin

Jian-Ping Wang

Zine Eddine Boutaghou

Jason Wayne Riddering

Lowell James Berg

Dian Song

Timothy William Stoebe

Jorge Vicente Hanchi

Mary Cynthia Hipwell

Gordon Merle Jones

Moshe Olim

Ram Mohan Rao

Youping Mei

Deborah S Schnur

Weimin Qian

Lanshi Zheng

Zheng Shi

Tim Stoebe

Patrick Quarterman

In some examples, a method including depositing a functional layer over a substrate; depositing a granular layer over the functional layer, the granular layer including a first material defining a plurality of grains separated by a second material defining grain boundaries of the plurality of grains; removing the second material from the granular layer such that the plurality of grains of the granular layer define a hard mask layer on the functional layer; and removing, via reactive ion etching with a carrier gas, portions of the functional layer not masked by the hard mask layer, wherein the carrier gas comprises a gas with an atomic number less than an atomic number of argon.

Embedded mask patterning process for fabricating magnetic media and other structures

Apparatus and associated method that contemplates performing a first atomic force microscope (AFM) scan of a first region of a sample centered at a first position at a first angle to produce a first scan image, the first AFM scan including a first component scan at a first speed and a second component scan at a second speed; performing a second AFM scan of the first region of the sample at a second angle to produce a second scan image, the second AFM scan including performing a third component scan at the first speed and a fourth component scan at the second speed; and correcting a first error in the first scan image based on the second scan image to produce a corrected image output.

Atomic force microscopy of scanning and image processing

A topographic profile of a structure is generated using atomic force microscopy. The structure is scanned such that an area of interest of the structure is scanned at a higher resolution than portions of the structure outside of the area of interest. An profile of the structure is then generated based on the scan. To correct skew and tilt of the profile, a first feature of the profile is aligned with a first axis of a coordinate system. The profile is then manipulated to align a second feature of the profile with a second axis of the coordinate system.

A magnetic sensor may be generally configured in accordance with various embodiments to have a magnetically responsive stack with first and second free layers and without a fixed magnetization. The first and second free layers can be tuned to have different stripe heights from an air bearing surface (ABS) and square rear surface features distal the ABS.

Magnetic sensor with differing stripe heights

A magnetic tunnel junction cell having a free layer and first pinned layer with perpendicular anisotropy, the cell including a coupling layer between the free layer and a second pinned layer, the coupling layer comprising a phase change material switchable from an antiferromagnetic state to a ferromagnetic state. In some embodiments, at least one actuator electrode proximate the coupling layer transfers a strain from the electrode to the coupling layer to switch the coupling layer from the antiferromagnetic state to the ferromagnetic state. Memory devices and methods are also described.

Magnetic memory with strain-assisted exchange coupling switch

A slider includes a slider body having a first side and edges defined adjacent to the first side, at least two separate insulators each adjacent to the first side of the slider body and supported by the slider body, and a conductive trace adjacent to each of the at least two separate insulators and opposite the first side of the slider body. The at least two separate insulators each are in physical contact with the slider body along the first side of the slider body such that the at least two separate insulators are physically attached to the slider body to electrically insulate each conductive trace from the slider body.

Top bond pad for transducing head interconnect

A slider according to the present invention includes a slider body, a plurality of insulators, and conductive traces. The slider body has a first side and edges defined substantially perpendicular to the first side. The plurality of insulators are each adjacent to the first side of the slider body. The conductive traces are adjacent to each of the plurality of insulators and opposite the slider body.

A method of processing a stack, the method including depositing a fusible material on a first hardmask layer, the first hardmask layer disposed on a surface of a pre-processed stack, the pre-processed stack being disposed on at least a portion of a substrate; heating the fusible material layer to a temperature at or above its melting point to cause it to form a fusible material sphere, the fusible material sphere disposed on less than the entire first hardmask layer; etching the first hardmask layer, wherein the fusible material sphere prevents a portion of the first hardmask layer from etching, thereby forming a second hardmask layer; and etching the pre-processed stack, wherein at least the second hardmask layer prevents a portion of the pre-processed stack from etching, thereby forming a stack.

Method of fabricating structures

One aspect of the present invention relates to a slider having a slider body. The slider body includes a bearing surface defining a bearing surface plane, a leading edge, a trailing edge, first side edge, a second side edge and at least one corner. A corner feature is positioned proximate the at least one corner. The corner feature includes a first portion oriented in a first direction and a second portion oriented in a second direction that is different then the first direction. At least one of the first direction and the second direction is toward the trailing edge and is oblique to the bearing surface plane.

Slider having recessed corner features

Atomic force microscopy scanning and image processing

A method for creating a pattern on an exposure site of a material blank using an exposure apparatus includes providing a mask having a first mask pattern. The mask is positioned between the exposure apparatus and the material blank. The exposure site of the material blank is exposed. One or more additional exposure events are performed for patterning the exposure site of the material blank. Between each exposure event, the exposure site of the material blank is repositioned in a lateral direction with respect to the mask. Between successive exposure events involving the first mask pattern, there is a relative movement between the mask and the material blank of a distance less than or equal to a length of the first mask pattern.

Mask complementary multiple exposure technique

A bond pad is elevated from a slider body by a conductive post. The bond pad is disposed atop the post, which typically possesses a cross-sectional area smaller than the surface are of the bond pad. Thus, rather than having the entire surface of the bond pad in contact with the slider body, only the cross-sectional area of the conductive post is in contact therewith. Alternatively, a bond pad may be split into two electrically coupled pads: one pad used for housing a permanent bond, and a second pad used for housing a temporary bond. The pad used to house the temporary wire bond may be disposed atop a sacrificial layer. After a lapping process, the sacrificial layer may be etched away, thereby permitting the temporary pad to be removed.

Thermal pole-tip recession/slide shape variation reduction

In an electrostatic actuator used to control fly height between a magnetic disc and a read/write head of a disc drive, a multi-layer electrode device is used. The multi-layer electrode device includes alternating insulating layers and conductive electrode layers. By controlling the material properties of each layer of the electrode device, problems associated with leakage current, field emission discharge, tunneling current, and slow actuator response time can be controlled.

Multi-layer electrode device on slider for electrostatic fly height adjustment

An electrostatic actuator for adjusting a spacing. A first body has an electrically conducting surface, and a second body has a body surface separated by the spacing from the electrically conducting surface. A conductor layer and an actuator electrode are recessed in the second body, and an electrode face faces the electrically conducting surface across the spacing. The actuator electrode comprises a semi-insulating material with a combination of electrical resistivity and thickness which prevents shorting of the conductor layer to the electrical conducting surface through a dielectric breakdown in the spacing.

Growing community of inventors

Eagan, MN, United States of America

Jianxin Zhu