Harbin Institute of Technology

JianWei Wu

Jiubin Tan

PengCheng Hu

JiWen Cui

ZhongPu Wen

Yongmeng Liu

Yin Zhang

An air suspension support and motion guiding device having unequal-depth throttling chambers. Throttling plugs () are arranged regularly on an air suspension working surface, forming an array of throttling chambers with unequal depths. The invention improves the rotational stiffness per unit area for an air suspension working surface while ensuring support and stability of an air-suspended rail () and enables construction of a small-volume, long cantilever, high torque load two-dimensional motion reference device.

Air suspension support and motion guiding device having unequal-depth throttling chambers

A cantilever linear motion reference device employing two-layer air suspension. By means of a two-layer force sealed air suspension structure, the invention realizes two-dimensional air suspension support and motion guiding and improves the rotational stiffness per unit for an air suspension working surface. By combining accurate driving and feedback control, the invention achieves high speed, high acceleration, high frequency motion, and enables construction of a small-volume, long cantilever, high torque load two-dimensional motion reference device.

Cantilever linear motion reference device employing two-layer air suspension

A dynamic-magnetic steel magnetic levitation double-workpiece-stage vector arc switching method and apparatus based on wireless energy transmission, falling within the semiconductor manufacturing equipment technology. The apparatus comprises a support frame (), a balance mass block (), magnetic levitation workpiece stages (), a workpiece stage measurement apparatus, wireless energy transmission apparatuses () and a wireless energy receiving apparatus (), wherein the two workpiece stages work between a measurement site () and an exposure site (); a laser interferometer () is used to measure the positions of the workpiece stages; the wireless energy transmission apparatuses () are used to provide energy for a sensor () in a micro-drive stage; the workpiece stages are driven using a magnetic levitation planar electrical motor; and during a double-workpiece-stage switching process, the planar electrical motor is used to drive the two workpiece stages so as to achieve single-beat arc quick switching. By using the method and apparatus, the problem that an existing stage switching scheme has many beats, a long track, many start-stop links and a long time for stabilization is solved, thereby reducing the stage switching links, shortening the stage switching time, and improving the productivity of a lithography machine.

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Harbin, China

JianWei Wu