Kla Tencor Corporation

University System of Maryland

Jianwei Wang

Thanh Huy Ha

Hedong Yang

Christopher Sears

Ajay Gupta

Michael John Van Riet

Chien-Huei Adam Chen

Christopher Maher

Chein-I Chang

Ichiro Honjo

Huina Xu

Adam Chien-Huei Chen

Michael Van Riet

Objective lens alignment of a scanning electron microscope review tool with fewer image acquisitions can be obtained using the disclosed techniques and systems. Two different X-Y voltage pairs for the scanning electron microscope can be determined based on images. A second image based on the first X-Y voltage pair can be used to determine a second X-Y voltage pair. The X-Y voltage pairs can be applied at the Q4 lens or other optical components of the scanning electron microscope.

Scanning electron microscope objective lens calibration using X-Y voltages iteratively determined from images obtained using said voltages

One embodiment relates to a method of inspecting an array of cells on a substrate. A reference image is generated using a cell image that was previously determined to be defect free. A reference contour image which includes contours of the reference image is also generated. The reference contour image is used to detect defects in the array of cells on the substrate. Another embodiment relates to a system for detecting defects in an array on a substrate. Other embodiments, aspects and features are also disclosed.

Contour-based array inspection of patterned defects

A Field Programmable Gate Arrays (FPGA) design uses a Coordinate Rotation DIgital Computer (CORDIC) algorithm that can convert a Givens rotation of a vector to a set of shift-add operations. The CORDIC algorithm can be easily implemented in hardware architecture, therefore in FPGA. Since the computation of the inverse of the data correlation matrix involves a series of Givens rotations, the utility of the CORDIC algorithm allows a causal Constrained Energy Minimization (CEM) to perform real-time processing in FPGA. An FPGA implementation of the causal CEM is described and its detailed architecture is also described.

Real-time implementation of field programmable gate arrays (FPGA) design in hyperspectral imaging

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San Jose, CA, United States of America

Jianwei Wang