Advanced Micro Devices Corporation

Jianshi Wang

Yue-Song He

Imran Khan

Jun Kang

Zhigang Wang

Richard M Fastow

Hao Fang

Guarionex Morales

Judith Quan Rizzuto

A method of fabricating a semiconductor device having a triple LDD (lateral diffused dopants) structure is disclosed. This fabrication method requires a single implant process, leading to reduction in fabrication costs and fabrication time. Moreover, this fabrication method increases the surface area of the gate structure of the semiconductor device that is available for silicide to be formed, leading to lower gate resistance.

Semiconductor device having triple LDD structure and lower gate resistance formed with a single implant process

The present invention is a method for fabricating a flash memory device. In one embodiment, a gate structure comprising a tunnel oxide layer, a floating gate layer, an oxide layer, and a control gate layer is fabricated on a semiconductor substrate. A rapid thermal oxidation (RTO) process is then performed to repair the tunnel oxide layer.

Method for fabricating a flash memory device

Method of fabricating semiconductor device having triple LDD structure and lower gate resistance formed with a single implant process

A non-volatile memory device comprising logic for charge restoration. The restore logic controls a read circuit for determining a value associated with the threshold voltage of a memory cell selected from a memory cell array, and compares the value to one or more boundary values to determine whether or not the memory cell value is out of bounds. In the event that the memory cell value is out of bounds, a target value for the memory cell is established. The restore logic controls a write circuit that applies a write pulse to the memory cell. The read and write process is repeated as necessary until the target value for the memory cell is achieved. The restore logic may include a processor for performing a statistical analysis on the memory cell array in order to determine target restoration values. Memory cells within the array may be reserved for use by the restore logic.

System and method for charge restoration in a non-volatile memory device

A method of depositing metal silicide onto a semiconductor substrate includes a step of depositing, by a CVD process, a first metal silicide layer with silane gas onto the semiconductor substrate. The method also includes a step of thermally treating and chemically cleaning the semiconductor substrate. The method further includes a step of depositing, by the CVD process, a second metal silicide layer with silane gas onto the semiconductor substrate. By this method, cracks in the metal silicide formed on the semiconductor substrate are minimized.

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San Jose, CA, United States of America

Jianshi Wang