Average Co-Inventor Count = 5.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Mattson Technology, Inc (2 from 278 patents)
2. Beijing E-town Semiconductor Technology, Co., Ltd (2 from 116 patents)
2 patents:
1. 12308209 - Workpiece processing apparatus with plasma and thermal processing systems
2. 11955315 - Workpiece processing apparatus with plasma and thermal processing systems