Beijing University of Technology

Jianjun Luo

Wei Li

Zhiyong Wang

Jingjing Dai

A high-power large-aperture fundamental mode vortex optical waveguide coherent VCSEL array is provided, and the coherent VCSEL array is a large-aperture array light-emitting structure, including an N electrode layer, an N-type DBR, an active region, an P-type DBR and a P electrode layer; micro/nanostructures pores with hexagonal lattice arrangement are etched on the surface of light output aperture on the each light-emitting unit mesa of the coherent VCSEL array, the micro/nanostructures pores are filled with highly doped semiconductor transparent materials to form a vortex optical waveguide structure. The provided combines the vortex optical waveguide structure and the P electrode layer in the traditional VCSEL array laser to realize the transverse and longitudinal regulation of the optical waveguide, the transverse and longitudinal injection of the current and the transverse and longitudinal conduction of the heat, and finally realizes the large-aperture high-power and high-coherence fundamental mode VCSEL array.

Growing community of inventors

Beijing, China

Jianjun Luo