Interface Optoelectronics (shenzhen) Co., Ltd.

General Interface Solution Limited

Interface Technology (chengdu) Co., Ltd.

Interface Optoelectronics (wuxi) Co., Ltd.

Jiangyun Zhou

Siqi Wang

Chao-Yi Yeh

Ya-Chu Yang

A method includes: transmitting an incident light to an object located on a stage, in which a first light and a second light are reflected; receiving the first light and the second light by an imaging lens group to obtain a third pattern corresponding to the first pattern and a fourth pattern corresponding to the second pattern; transmitting the third pattern and the fourth pattern to an image sensor, in which a center point of the third pattern and a center point of the fourth pattern are separated by a first distance on the image sensor; calculating a tilted angle between an optical axis of the imaging lens group and a normal direction of the stage according to the first distance; and adjusting the stage according to the tilted angle such that the normal direction is parallel to the optical axis.

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Guangdong, China

Jiangyun Zhou