Chinese Academy of Sciences

Beijing Rslaser Opto-electronics Technology Co., Ltd.

Beijing Rslaser Opto-electroncis Technology Co., Ltd.

Rainbow Source Laser

Jiangshan Zhao

Hui Li

Yu Wang

Qian Wang

Pengfei Sha

Guangyi Liu

Yi Zhou

Hua Zhang

Rui Jiang

Xiaoquan Han

Qingqing Yin

Jinbin Ding

Lijia Zhang

Xinyue Hu

Kuibo Wang

Yaoying Shan

Yuanyuan Fan

Xingliang Song

Haiyan Shi

Qianwei Cai

Zhuojun Peng

Provided are a device () and a method for online measuring a spectrum for a laser device. The device () for online measuring a spectrum for a laser device includes: a first optical path assembly (G) and a second optical path assembly (G), and the second optical path assembly (G) and the first optical path assembly (G) constitute a measurement optical path. The second optical path assembly (G) includes: an FP etalon () and a grating (). The homogenized laser beam passes through the FP etalon () to generate an interference fringe. The grating () is arranged after the FP etalon (), or is arranged before the FP etalon () in the measurement optical path, and is configured to disperse the laser beam passing through the FP etalon ().

Device and method for online measuring spectrum for laser device

According to the present disclosure, there is provided a device () and a method for measuring a wavelength for a laser device. The device () for measuring a wavelength for a laser device includes: a first optical path assembly and a second optical path assembly. The first optical path assembly and the second optical path assembly constitute a laser wavelength measurement optical path. The second optical path assembly includes: an FP etalon assembly () and an optical classifier (). The homogenized laser beam passes through the FP etalon assembly () to generate an interference fringe. The optical classifier () is arranged after the FP etalon assembly () in the laser wavelength measurement optical path, and configured to deflect the laser beam passing through the FP etalon assembly ().

Device and method for measuring wavelength for laser device

The present disclosure proposes a flow guide device for a discharge cavity having a symmetrical configuration and including two pairs of electrodes; the flow guide device comprises two rotors which correspond to one pair of the two pairs of electrodes, respectively, installed positions of which are symmetrical about a symmetrical plane of the discharge cavity and is beneath the electrodes, a rotational axis of which is parallel to an axial direction of the electrodes which is parallel to a base plane of the discharge cavity, and the two rotors have opposite rotation directions and identical rotation speeds. The flow guide device further comprises a spoiler plate and a flow guide plate so that the discharge gas flow passes through the discharge cavity in a manner of high speed and uniform cycling when flowing through the discharge region. Thus, the discharge quality is guaranteed so as to improve the energy and reliability of the laser.

Flow guide device for dual-electrode discharge cavity, dual electrode discharge cavity utilize the same and excimer laser

A single-cavity dual-electrode discharge cavity and an excimer laser including such a discharge cavity are disclosed. The discharge cavity may comprise a cavity body and two sets of main discharge electrodes. The cavity body may comprise a left chamber and a right chamber arranged to form a symmetric dual-chamber cavity. The left and right chambers can interface and communicate with each other at a plane of symmetry of the entire discharge cavity. The two sets of main discharge electrodes can be disposed in the left and right chambers on the upper side, respectively. According to the present disclosure, the single-cavity configuration can be used to achieve functions of dual-cavity configurations, such as MOPA, MOPO, and MOPRA. Thus, it is possible to reduce system complexities and also ensure synchronization of discharging in the discharge cavity.

Single cavity dual-electrode discharge cavity and excimer laser

Growing community of inventors

Beijing, China

Jiangshan Zhao