Saraya Co., Ltd.

Jianglong Yu

Haijun Zhang

Tomomasa Itarashiki

Daiki Anraku

Qinghai Zhao

Provided is a system for supplying a liquid (such as an irritative chemical solution) safely. This liquid supplying system comprises: (a) a means that creates a negative pressure in a treatment chamber by driving a first depressurizing means and depressurizing the treatment chamber; (b) a means that introduces the negative pressure of the treatment chamber to a measurement chamber; (c) a means that maintains the negative pressure introduced to the measurement chamber; (d) a means that sucks a liquid from a container into the measurement chamber by employing the negative pressure of the measurement chamber; and (e) a means that sucks the liquid of the measurement chamber into the treatment chamber by employing a vacuum in the treatment chamber.

Liquid supplying system and method for driving same

Provided is a system for supplying a liquid (such as an irritant chemical solution) safely. This liquid supplying system comprises: a base on which a container containing liquid is placed; a hollow needle having a spired part; a first movement mechanism that moves the needle between a first needle position at which the spired part is separated from the container and a second needle position at which the spired part is passed through a wall of the container; a hollow tube having a smaller outer diameter than the inner diameter of the lumen of the needle; and a second movement mechanism that moves the tube between a first tube position separated from the container and a second tube position at which the tube is passed through the lumen of the needle located at the second needle position and is inserted inside the container.

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Shandong, China

Jianglong Yu