Front Edge Technology, Inc.

Jianchao Li

Kai-Wei Nieh

Sandeep Makhar

Victor Krasnov

Tung-Hsiu Shih

A method of fabricating a battery comprises selecting a battery substrate having cleavage planes, and depositing on the battery substrate, one or more battery component films comprising electrode films that at least partially surround an electrolyte film. Pulsed laser beam bursts are applied to the battery component films at a sufficiently high power level to vaporize portions of the films to form shaped battery features. The pulsed laser bursts shape the films substantially without causing fractures along the cleavage planes of the battery substrate. Pulsed laser shaping can be used to replace the use of a mask in the fabrication of shaped battery components.

Thin film battery fabrication using laser shaping

A battery fabrication method comprises forming at least one battery cell on a battery substrate by depositing a plurality of battery component films on the battery substrate, the battery component films comprising at least a pair of electrodes about an electrolyte. An overlying protective multilayer coating is formed over the battery cell. A plurality of pulsed laser bursts of a pulsed laser beam is applied to the battery substrate, the pulsed laser bursts having sufficient power and duration to cut through the battery substrate and the overlying protective multilayer coating.

Pulsed laser cutting of thin film battery

In a method of fabricating a battery, a substrate is annealed to reduce surface contaminants or even water of crystallization from the substrate. A series of battery component films are deposited on a substrate, including an adhesion film, electrode films, and an electrolyte film. An adhesion film is deposited on the substrate and regions of the adhesion film are exposed to oxygen. An overlying stack of cathode films is deposited in successive deposition and annealing steps.

Thin film battery and manufacturing method

A method of fabricating a battery comprises selecting a battery substrate having cleavage planes, and cutting the battery substrate with pulsed laser bursts from a pulsed laser beam to control or limit fracture along the cleavage planes. The pulsed laser beam was also found to work well on thin substrates which are sized less than 100 microns. Before or after the cutting step, a plurality of battery component films can be deposited on the battery substrate. The battery component films include at least a pair of electrodes about an electrolyte which cooperate to form a battery.

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El Monte, CA, United States of America

Jianchao Li