Xi'an Jiaotong University

Jianbin Pan

Mingzhe Rong

Aijun Yang

Xiaohua Wang

Huan Yuan

Jifeng Chu

Dawei Wang

Xianbo Huang

The invention discloses a method for measuring a semiconductor gas sensor based on virtual alternating current impedance. The method comprises: combining measurement parameters of virtual measurement frequencies in a first predetermined range and virtual parallel capacitance values in a second predetermined range, and measuring gas with known concentrations at each characteristic quantity among nine characteristic quantities in the case of each combination; obtaining multiple characteristic values corresponding to the same gas concentration at each characteristic quantity after traversing all parameter combinations and all nine characteristic quantities; and selecting virtual measurement frequencies in a third range, virtual parallel capacitance values in a fourth range and one or several corresponding characteristic quantities as the finally selected measurement parameters for measuring the unknown gas concentration.

Method for measuring semiconductor gas sensor based on virtual alternating current impedance

The present invention discloses a measuring method for a semiconductor gas sensor based on alternating-current impedance. The method includes the steps: connecting the semiconductor gas sensor to a capacitor in parallel, connecting an alternating-current impedance measuring device to the semiconductor gas sensor and the capacitor, combining measuring parameters under measuring frequencies within a first preset range and parallel capacitance values within a second preset range, and measuring a gas with a known concentration according to each of nine features under each combination; traversing all parameter combinations and all the nine features to obtain a plurality of feature values corresponding to the same gas concentration under each feature; and selecting measuring frequencies within a third range, parallel capacitance values within a fourth range and a certain or several of the corresponding features as measuring parameters finally selected for measuring an unknown gas concentration.

Measuring method for semiconductor gas sensor based on alternating-current impedance

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Shaanxi, China

Jianbin Pan