Acm Research (shanghai) Inc.

Guangzhou Metro Design & Research Inst. Co. Ltd.

Jian Wang

Hui Wang

Fuping Chen

Xiaoyan Zhang

Fufa Chen

Hongchao Yang

Shu Qing Yang

Wenjun Wang

Voha Nuch

Haiou Shi

Wenqu Zeng

Quan Yuan

Yunlin Zhang

A coater with automatic cleaning function and a coater automatic cleaning method. The coater () includes a coater chamber () capable of being filled up with cleaning solution, a substrate chuck () holding and positioning a substrate (), and at least one shroud () capable of moving up for preventing photoresist from splashing out of the coater chamber (), or moving down and immersing into the cleaning solution for cleaning. The coater () automatic cleaning method includes the following steps: turning off a liquid outlet valve (A,B,) of the coater (); filling up a coater chamber () with cleaning solution; after photoresist in the coater chamber () being dissolved into the cleaning solution, turning on the liquid outlet valve (A,B,) and draining the cleaning solution out of the coater chamber ().

Coater with automatic cleaning function and coater automatic cleaning method

Provided is a method for scheduling resource-constrained project by IWO. The method establishes a resource-constrained project scheduling model first, converts the project scheduling issue in actual engineering into the combination and optimization in a mathematical model, then the optimization aims at minimizing the project total duration, while considering the immediate predecessor/successor constraints of the project activities and a variety of renewable resource constraints, to construct project scheduling model, lastly IWO is used to seek the solution for large-scale project scheduling. In the solution process, a right-shift decoding strategy was designed to rectify the ineligible solutions that occurred during the generation of weed seeds, ensure that all solutions are in compliance with the immediate predecessor/successor constraints of the project activities, and improve the efficiency of algorithm. Solution efficiency. The resource-constrained project scheduling scheme of the present invention can effectively shorten the total construction period of large-scale project.

Method for scheduling resource-constrained project by invasive weed optimization

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Guangzhou, China

Jian Wang