Ta Liang Technology Co., Ltd.

Jian-Shian Lin

Chun-Chen Chen

Chao-Chang Chen

Hsien-Ming Lee

Ching-Tang Hsueh

Jen-Chieh Li

Yong-Jie Ciou

Jen-Chien Li

A method for repairing a polishing pad in real time includes a trimming step, a detection step, and a reconstruction and analysis step. A surface morphology of the polishing pad is reconstructed through detection, and analysis is performed according to the reconstruction, to ensure that a surface of the polishing pad can recover its function after the surface of the polishing pad is trimmed, so that the polishing pad can be used effectively to reduce costs.

Method for repairing polishing pad in real time

A system and a method for uniformed surface measurement are provided, in which a sensor is provided to perform measurements on a carrier in a polishing machine, and a measuring trajectory of the sensor on the carrier is adjusted by controlling the pivoting of a sensor carrier carrying the sensor and the rotation of a rotating platform in the polishing machine in order to achieve uniformed surface measurements of the carrier and real-time constructions of the surface topography. This allows the polishing state of the carrier to be monitored in real time, thereby improving the efficiency of the polishing process. A sensing apparatus for uniformed surface measurement is also provided.

Method, system and apparatus for uniformed surface measurement

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Taipei, Taiwan

Jian-Shian Lin