Onto Innovation Inc.

Jian Lu

Xin Song

J Casey Donaher

Christopher J McLaughlin

Wayne Fitzgerald

Elvino Da Silveira

Keith Frank Best

Systems and methods for improving substrate fabrication are provided. Subsets of dies of substrates may be inspected at various points in the fabrication process to generate spectra data. The spectra data can be used to generate data that are input to a machine learning model to predict yields for the substrates.

Semiconductor substrate yield prediction based on spectra data from multiple substrate dies

A method for correcting misalignments is provided. An alignment for each device of a group of devices mounted on a substrate is determined. An alignment error for the group of devices mounted on the substrate is determined based on the respective alignment for each device. One or more correction factors are calculated based on the alignment error. The alignment error is corrected based on the one or more correction factors.

System and method for optimizing a lithography exposure process

Growing community of inventors

Chelmsford, MA, United States of America

Jian Lu