Globalfoundries Inc.

Jian Liu

Norman Chen

Yuyang Sun

Mahbub Rashed

Marc Laurent Tarabbia

Anurag Mittal

Tuhin Guha Neogi

Nader Magdy Hindawy

A method includes electrically connecting a plurality of cells of a standard cell library to a power rail. A contact area is deposited to connect a first active area and a second active area of a cell of a plurality cells. The first area and the second area are located on opposite sides of the rail and electrically connected to different drains. The contact area is electrically connected to the power rail using a via. The contact area is masked to remove a portion of the contact area to electrically separate the first active are from the second active area.

Power rail layout for dense standard cell library

One illustrative method disclosed herein involves identifying an overall target pattern comprised of at least one hole-type feature, decomposing the overall target pattern into at least a first sub-target pattern and a second sub-target pattern, wherein the first sub-target pattern and the second sub-target pattern each comprise at least one common hole-type feature, generating a first set of mask data information corresponding to the first sub-target pattern, and generating a second set of mask data information corresponding to the second sub-target pattern.

Multiple patterning process for forming trenches or holes using stitched assist features

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Beacon, NY, United States of America

Jian Liu