Goertek Inc.

Jialiang Yan

Quanbo Zou

Zhe Wang

Qinglin Song

Xiaoyang Zhang

Yujing Lin

A MEMS microphone, comprising a packaging structure that is enveloped by a PCB substrate () and a housing (), wherein the packaging structure is provided with a MEMS acoustoelectric chip () therein, and the PCB substrate () is provided with a sound port () at a position that is corresponding to the MEMS acoustoelectric chip (), wherein, the MEMS microphone further comprises a filter (), wherein the filter () is embedded into a back cavity of the MEMS acoustoelectric chip (), the filter () and the PCB substrate () have a lateral hole therebetween, and the lateral hole serves as a sound channel that is used by the MEMS acoustoelectric chip () to gather sound. The MEMS microphone can prevent gas shock, block the interfering to the MEMS microphone by kinetic particles, keep the acoustic performance of the MEMS microphone, and reduce the packaging size of the MEMS microphone.

MEMS microphone

A micro laser diode projector comprises: an MEMS scanning device, which rotates around a first axis and a second axis that are orthogonal to each other; and a micro laser diode light source including at least one micro laser diode, wherein the micro laser diode light source is mounted on the MEMS scanning device and rotates around the first and second axes with the MEMS scanning device to project light to a projection screen. An electronics apparatus including the micro laser diode projector is also discussed.

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Province, China

Jialiang Yan