Korea Institute of Science and Technology

Kist Corp.

Ji-Young Byun

Hyun-Kwang Seok

Heon-Phil Ha

Do-Hyung Kim

Jin-young Choi

Jang-Won Kim

Jae-Chul Lee

Ho-In Lee

Yu-Chan Kim

Kyung-Tae Hong

Kyoung-Tae Kim

Jin-Kook Yoon

Jun-Hyun Han

Yoon-Bae Kim

Jung-Man Doh

Dow-Bin Hyun

Seung-Hee Han

Sung-Bai Lee

Disclosed are an apparatus and a method for plasma ion implantation of a solid element, which enable plasma ion implantation of a solid element. According to the apparatus and method, a sample is placed on a sample stage in a vacuum chamber, and the inside of the vacuum chamber is maintained as a vacuum state. And, gas is supplied in the vacuum chamber, a first pulsed DC power is applied to a magnetron sputtering source so as to generate plasma ions of a solid element. The plasma ions of a solid element sputtered from the source are implanted on the surface of the sample. The first power is a pulse DC power capable of applying a high power the moment a pulse is applied while maintaining low average power. And, simultaneously with the applying of the first pulse power, a second power may be supplied to the sample stage, which is a high negative voltage pulse accelerating plasma ions of a solid element to the sample and synchronized to the pulse DC power for magnetron sputtering source. And, inductively coupled plasma may be generated in the vacuum chamber via antenna so as to increase ionization rate of a solid element and lower operation pressure of magnetron sputtering source.

Method and apparatus for plasma ion implantation of solid element

The present invention relates to a method for manufacturing a Fe&#x2014;Si alloy powder. A method for manufacturing a Fe&#x2014;Si alloy powder includes: providing a mixture of an AlOpowder, an active agent powder, a Si powder, and a Fe powder; heating the mixture with a temperature of 700&#xb0; C. to 1200&#xb0; C. in the hydrogen atomosphere; magnetically separating a Fe-containing material from the mixture; and separating a Fe&#x2014;Si alloy powder by soaking the Fe-containing material in an alkali solution. In the heating of the mixture, the Si powder is deposited on the surface of the Fe powder and diffused into the Fe powder.

Method for manufacturing Fe&#x2014;Si alloy powders

The present invention relates to a composite layer including a metal and inorganic powders, and a method for manufacturing the same. The method for manufacturing a composite layer including a metal and inorganic powders includes step of preparing an electrolyte which includes nickel sulfamate [Ni(NHSO)] at 50.0 g/l&#x2dc;300.0 g/l, boric acid at 10.0 g/l&#x2dc;20.0 g/l, nickel chloride (NiCl) at 1.0 g/l&#x2dc;10.0 g/l, coumarin (CHO) at 0.02 g/l&#x2dc;0.5 g/l, sodium dodecyl sulfate [CH&#x2014;(CH)&#x2014;OSONa] at 4.0 g/l&#x2dc;60.0 g/l, sulfuric acid at 0.0 ml/l&#x2dc;150.0 ml/l, one or more inorganic powders selected from the group of alumina (AlO) and silicon carbide (SiC) at 20.0 g/l&#x2dc;70.0 g/l, and the remainder being distilled water. A basic metal to be coated with the composite metal is dipped into the electrolyte, and power is applied to the basic metal to electroplate the basic metal with the electrolyte to form a composite layer on the basic metal.

Composite layer including metal and inorganic powders and method for manufacturing the same

In a method for fabricating a Si&mdash;Al alloy packaging material, by adding Al&mdash;Si alloy powders to Si powders and pressurizing-forming it, or by pressurizing-filling Si powders or a preforming body of Si powders with Al&mdash;Si alloy melt, a Si&mdash;Al alloy packaging material having good characteristics can be obtained.

Method for fabricating Al-Si alloy packaging material

Growing community of inventors

Seoul, South Korea

Ji-Young Byun