Average Co-Inventor Count = 5.71
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Lam Research Corporation (2 from 3,783 patents)
2 patents:
1. 12504692 - Cyclic development of metal oxide based photoresist for etch stop deterrence
2. 12474640 - Integration of dry development and etch processes for EUV patterning in a single process chamber