Semes Co., Ltd.

Hyundai Motor Company

Kia Motors Corporation

Other

Kia Corporation

University of Utah Research Foundation

Hyundai Sungwoo Casting Co Ltd

Ji Hoon Jeong

Young Dae Chung

Tae Shin Kim

Jee Young Lee

Won Geun Kim

Hyun Yoon

Jung Suk Goh

Tae Hee Kim

Se Hoon Oh

Pil Kyun Heo

Ki Hoon Choi

Hyo Won Yang

Ye Rim Yeon

Bong Ho Lee

Ji Min Lim

Won-Geun Kim

Dong Chul Park

Sun Hwa Kim

Sung Wan Kim

David A Bull

Do Yeon Kim

Hyun Ku Lee

Kuk Saeng Kim

Kwang Sup Kim

Young Je Um

Young Il Kim

In Ki Jung

Sang Bum Park

Hyun Goo Park

Cheng Bin Cui

Yong Jun Seo

Do Youn Lim

Byeong Geun Kim

Yoon Ki Sa

Kitae Lee

Young Eun Jeon

Seong Hun Choi

Jong Ju Lee

Tae-il Kim

Jae Seong Lee

Moon Seok Lee

Ki Soo Yoon

Chang Beom Kim

Eun Seok Yoo

Moonseok Lee

Young Jin We

Hoe Jo Jeong

Da Woon Lim

Yuan Lu Sun

Dong Kon Lee

Jae Hyn Park

Sung Kwang Shin

The inventive concept provides a mask treating apparatus. The mask treating apparatus includes a support unit configured to support and rotate a mask, the mask having a first pattern within a plurality of cells thereof and a second pattern outside regions of the plurality of cells; a heating unit including a laser irradiation module and a moving module, the laser irradiation module having a laser irradiator for irradiating a laser light to the second pattern, the moving module configured to change a position of the laser irradiation module; and a controller configured to control the support unit and the heating unit, and wherein when a treating position is divided into four equal parts from a first quadrant to a fourth quadrant based on a center of the mask, the laser irradiator is positioned at the fourth quadrant and the first quadrant in a direction linearly moving from a standby position to the treating position, positioned at the third quadrant in a direction which is perpendicular to the fourth quadrant, and positioned at the second quadrant in a direction which is perpendicular to the first quadrant, and wherein the controller controls a rotation of the support unit so the second pattern is positioned at the fourth quadrant.

Apparatus and method for treating substrate

The present disclosure provides a substrate treating apparatus. The substrate treating apparatus includes a support unit that supports a substrate, and a laser unit that irradiates a laser beam to the substrate supported by the support unit, the laser unit includes an irradiation member that irradiates the laser beam, a lens disposed on a travel path of the laser beam irradiated by the irradiation member to be rotatable, and a reflection member having an inclined surface for changing the travel path of the laser beam that passed through the lens.

Substrate treating apparatus

A photomask correction method capable of increasing the photomask precision is provided. The photomask correction method comprises measuring an intensity profile of a laser, acquiring etching amount data corresponding to the measured intensity profile using a library, determining a process parameter of the laser based on the etching amount data, and correcting a photomask with the laser according to the determined process parameter.

Apparatus for correcting photomask and method thereof

The present disclosure provides a substrate treating apparatus. The substrate treating apparatus includes a support unit that supports a substrate, and a heating unit that irradiates a beam to the substrate and heat the substrate, and the heating unit further includes an irradiation part that irradiates the beam, and a rotation part that rotates the beam.

A wheel for reducing a resonance noise in a vehicle may include a cylindrical-shaped rim on which a tire is mounted, and waveguides mounted on the rim, disposed in a cavity which is a space between the rim and the tire, having a 'U'-shaped internal passage through which a sound wave generated in the cavity enters, and configured to reflect the sound wave entering the internal passage to generate a sound wave having an inverse phase, wherein a center portion of the internal passage extends in an axial direction of the rim, and first and second end portions of the internal passage are connected to a center portion of the internal passage to allow the sound wave to propagate and extend in a circumferential direction of the rim.

Wheel for reducing resonance noise in vehicle

A substrate processing method and a substrate processing apparatus for removing material on a substrate are disclosed. In order to remove the material, a processing liquid including a chemical liquid and water is supplied on the substrate so that a liquid layer maintained by surface tension is formed. The material is removed from the substrate by a reaction between the material and the processing liquid. A size distribution of by-product particles formed by the reaction between the material and the processing liquid is measured by a dynamic light scattering method. A supply of the processing liquid is controlled based on the size distribution of the by-product particles.

Substrate processing control using a measured size distribution of by-product particles

Disclosed is a substrate treatment apparatus including a rotation unit that supports and rotates a substrate, a chemical discharge unit that discharges a chemical solution to the rotation unit, a chemical recovery unit disposed close to the rotation unit and configured to recover the chemical solution scattering from the rotation unit, and a laser irradiation unit that applies a laser beam to the substrate and heats the substrate.

Substrate treatment apparatus

The inventive concept provides a mask treatment apparatus. The mask treatment may include a support unit that supports the mask, and a light irradiation unit that irradiate the mask with a light to adjust a critical dimension of a pattern formed in the mask, wherein the light irradiation unit includes a light source that generates the light, and a light modulation element that modulates the light generated by the light source and forms an irradiation pattern.

Mask processing apparatus and substrate processing apparatus

Proposed is a substrate heating unit including: a laser generator providing a laser beam for heating a substrate; and a beam shaper processing the laser beam from the laser generator and selectively providing one of a first beam having a uniform energy distribution and a second beam having an edge-enhanced energy distribution to the substrate.

Substrate heating unit, substrate processing apparatus, and substrate processing method

A substrate treatment apparatus includes a substrate support unit, a chemical supply unit supplying a chemical solution onto an upper surface of a substrate supported on the substrate support unit, a laser irradiation unit applying a laser pulse to the substrate to heat the substrate, and a controller controlling the laser irradiation unit to emit the laser pulse such that the substrate is repeatedly heated and cooled to maintain a preset temperature.

Apparatus for and method of treating substrate

Method and apparatus for etching a thin layer including silicon nitride formed on a substrate are disclosed. Etchant including phosphoric acid and water is supplied on the substrate so that a liquid layer is formed on the substrate. The thin layer is etched by reaction between the thin layer and the etchant. Thickness of the liquid layer is measured to detect variation in the thickness of the liquid layer while etching the thin layer. Variation in the concentration of the phosphoric acid and the water is calculated based on the variation in the thickness of the liquid layer. Water is supplied on the substrate based on the variation in the concentration of the phosphoric acid and the water so that the concentration of the phosphoric acid and the water becomes a predetermined value.

Method and apparatus for etching thin layer

A functional health food containingextract as an active ingredient for preventing or improving metabolic disorders or for weight loss, a pharmaceutical composition containingextract as an active ingredient for preventing or treating metabolic disorders, a functional health food containingextract as an active ingredient for preventing or improving fatty liver, and a functional health food containingextract as an active ingredient for inhibiting the accumulation of visceral fat.

[object Object]

An apparatus for generating a virtual engine sound is provided. The apparatus includes a rotating bracket member that is disposed within a wheel of a vehicle and includes movement space therein, and elastic bodies, each of which has a first end fixed to a substantial rotation center position of the rotating bracket member. In addition, the apparatus includes weight bodies which are fixed to a second end of the elastic body, and are configured to move within the movement space based on a rotation speed of the wheel of the vehicle, and selectively contact the rotating bracket member.

Apparatus for generating virtual engine sound

Disclosed is a system and method for controlling a virtual engine sound of a hybrid vehicle or an electric vehicle. More specifically, the system includes a sensor for detecting when the vehicle is inside an enclosure; a virtual engine sound generation portion for generating the virtual engine sound of the vehicle; and a control portion for receiving data detected by the sensor to control the virtual engine sound based upon whether or not the vehicle is inside the enclosure, and transmitting a control signal corresponding to the data to the virtual engine generation portion.

System for controlling virtual engine sound and method thereof

An active noise control apparatus for an intake system of a vehicle may include a filter mounted on a portion of the intake system for blocking foreign materials; and a speaker assembly detachably installed at the portion to which the filter is mounted.

Active noise control apparatus for intake system of vehicle

Growing community of inventors

Hwaseong-si, South Korea

Ji Hoon Jeong