Visera Technologies Company Limited

Ji-Hong Lin

Tzu-Wei Huang

Huang-Jen Chen

A solid-state imaging device having flat microlenses is provided. The solid-state imaging device includes a semiconductor substrate having a plurality of photoelectric conversion elements. The solid-state imaging device further includes a color filter layer disposed above the semiconductor substrate. The solid-state imaging device also includes a microlens having a flat top surface disposed on the color filter layer. The flat top surface of the microlens is directly above the photoelectric conversion element, and the area of the flat top surface of the microlens is equal to the area of the photoelectric conversion element.

Solid-state imaging devices having flat microlenses

Methods of fabricating solid-state imaging devices having a flat microlens array are provided. The method includes providing a semiconductor substrate having a plurality of photoelectric conversion elements. A color filter layer is formed above the semiconductor substrate. A lens material layer is formed on the color filter layer. A hard mask having a lens-shaped pattern is formed on the lens material layer. The method further includes etching both the hard mask and the lens material layer to form a microlens with a flat top surface that is formed from the lens material layer, and to leave a portion of the hard mask on the flat top surface of the microlens. The method also includes removing the portion of the hard mask that remains on the microlens.

Growing community of inventors

Kaohsiung, Taiwan

Ji-Hong Lin