Average Co-Inventor Count = 5.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Taiwan Semiconductor Manufacturing Comp. Ltd. (2 from 40,927 patents)
2 patents:
1. 12215422 - Shower head structure and plasma processing apparatus using the same
2. 11859284 - Shower head structure and plasma processing apparatus using the same