Taiwan Semiconductor Manufacturing Comp. Ltd.

Jhih-Jian Wang

Ru-Gun Liu

Ken-Hsien Hsieh

Huang-Yu Chen

Li-Chun Tien

Lee-Chung Lu

Wen-Chun Huang

Pin-Dai Sue

Chin-Chang Hsu

Tsong-Hua Ou

Chin-Hsiung Hsu

Cheng Kun Tsai

Among other things, one or more techniques and systems for performing design layout are provided. An initial design layout is associated with an electrical component, such as a standard cell. The initial design layout comprises a first pattern, such as a mandrel pattern, and a second pattern, such as a passive fill pattern. An initial cut pattern is generated for the initial design layout. Responsive to identifying a design rule violation associated with the initial cut pattern, the initial design layout is modified to generate a modified initial design layout. An updated cut pattern, not resulting in the design rule violation, is generated based upon the modified initial design layout. The updated cut pattern is applied to the modified initial design layout to generate a final design layout. The final design layout can be verified as self-aligned multiple patterning (SAMP) compliant.

Self-aligned multiple patterning layout design

Provided is a method of fabricating a semiconductor device. The method includes providing an integrated circuit layout plan, the integrated circuit layout plan containing a plurality of semiconductor features. The method includes selecting a subset of the features for decomposition as part of a double patterning process. The method includes designating a relationship between at least a first feature and a second feature of the subset of the features. The relationship dictates whether the first and second features are assigned to a same photomask or separate photomasks. The designating is carried out using a pseudo feature that is part of the layout plan but does not appear on a photomask. The method may further include a double patterning conflict check process, which may include an odd-loop check process.

Double patterning methodology

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Taiping, Taiwan

Jhih-Jian Wang