Taiwan Semiconductor Manufacturing Comp. Ltd.

Jhang-Jie Jian

Wen-Chih Chiang

Chi-Chung Jen

Yu-Chun Shen

Kai-Hung Hsiao

A semiconductor wafer processing system includes a stocker having an interior surface, a wafer carrier disposed within the stocker, a wafer shelf disposed within the wafer carrier for storing a semiconductor wafer, and a discharge circuit including a first conductor electrically coupled to the wafer shelf and a first current controller electrically coupled to the first conductor and to the interior surface of the stocker.

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Tainan, Taiwan

Jhang-Jie Jian