The Boc Group, Inc.

Jesse D Wolfe

Abraham I Belkind

Ronald E Laird

James J Hofmann

Carolynn Boehmler

Paul I Young

Leonard Wamboldt

An infrared reflecting interference filter capable of transmitting a desired proportion of visible radiation while reflecting a large portion of incident solar radiation is provided. The filter comprises a transparent substrate onto which is deposited a dielectric layer, followed by metal and dielectric layers. In between each of the dielectric and metal layers is deposited a precoat layer that promotes adhesion between the dielectric and the metal. One aspect of the invention is the use of a film comprising nickel and chromium nitride for each of the metal precoat layers. These precoat layers are thin so that there is less absorption of visible light but yet maintains good adhesive properties. Another aspect of the invention is the use of silver as the metal layer. Specifically, silver is sputtered in an atmosphere containing a mixture of nitrogen and argon or other inert gas. It was found that the presence of nitrogen produces a silver layer that is more durable than silver films sputtered in an atmosphere containing essentially pure inert gas. In one embodiment, the interference filter comprises a glass substrate onto which is deposited a thin-film design consisting of five layers, namely: titanium dioxide, nickel-chromium nitride, silver, nickel-chromium nitride, and silicon nitride.

Durable low-emissivity solar control thin film coating

The present invention comprises a contrast-improving filter which uses a tri-layer comprising a metal layer, preferably silver, sandwiched between two metal precoat layers. The silver layer is thin so that it is substantially transparent to visible light. Additionally, the contrast-improving filter uses a silicon nitride layer between the tri-layer and further oxide layer to improve the durability and scratch-resistance of the contrast-improving filter.

Electrically-conductive, contrast-selectable, contrast-improving filter

An infrared reflecting interference filter capable of transmitting a desired proportion of visible radiation while reflecting a large portion of incident solar radiation is provided. The filter consists of a transparent substrate coated first with a dielectric layer, next a partially metal reflectance layer, and finally an outer protective dielectric layer. In addition, between each metal-dielectric interface is deposited a nucleation or glue layer that facilitates adhesions and improves chemical and mechanical resistance. The interference filters are durable and can be modified to provide a full range of optical and electrical characteristics. The dielectric layer can comprise of composite films consisting of silicon nitride in combination with zirconium nitride, titanium nitride, and/or hafnium nitride.

A triple magnetron array positioned inside a vacuum chamber is provided. The array includes a planar magnetron situated above dual rotatable unbalanced cylindrical magnetrons. The planar magnetron is partially shielded from the dual magnetrons by a baffle. An inert gas outlet is positioned near the planar magnetron target whereas oxygen gas outlets are positioned near the cylindrical magnetrons. In this fashion, the reactive gas flow to the planar magnetron is restricted. The system is particularly well suited for forming metal oxide films, such as titanium oxide, that are difficult to deposit by conventional means. The oxygen flow rate is controlled so that the planar magnetron operates in the metallic mode.

Device and method for depositing metal oxide films

A method of depositing thin films of silicon based compounds, particularly silicon dioxide, by cathode reactive sputtering utilizes a rotating cylindrical magnetron driven by a d.c. potential. The result is a technique of forming a uniform film on large substrates with high deposition rates. Arcing normally associated with sputtering troublesome dielectric coatings such as silicon oxides is substantially eliminated.

Method for coating substrates with silicon based compounds

A five-layer coating, commonly called a 'stack', for glass windows in order to control the proportion of solar radiation permitted to pass through the window, the remainder being reflected by the coating, while maintaining a desired visible light characteristic transmission. Particularly, the technique is applied to vehicle glass windows, such as truck and automobile windshields, where the amount of solar radiation allowed to pass into the vehicle through the window is minimized within the constraints of maintaining visible light transmission above a certain legal level. The characteristics of the coating are also selected for visible light reflected from the window to the outside to be a substantially neutral color, highly desirable for the overall appearance of trucks and automobiles.

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San Ramon, CA, United States of America

Jesse D Wolfe