Mks Instruments, Inc.

Jesse A Weber

Gerardo A Brucker

Larry K Carmichael

Michael N Schott

John H Henry

Kenneth D Van Antwerp, Jr

An ionization gauge that measures pressure has an electron source that emits electrons, and an anode that defines an ionization space. The gauge also includes a collector electrode to collect ions formed by an impact between the electrons and a gas and to measure pressure based on the collected ions. The electron source is dynamically varied in emission current between a plurality of emission levels dependent on pressure and a second parameter other than pressure. The ionization gauge may also vary various operating parameters of the gauge components according to parameters stored in a non-volatile memory and selected by a user.

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Arvada, CO, United States of America

Jesse A Weber