Kla Tencor Corporation

Sandia Corporation

Jeromy T Hollenshead

Gildardo Rios Delgado

Leonard Elliott Klebanoff

Guorong Vera Zhuang

Karl R Umstadter

Elena Starodub

An optical instrument, including a chamber, an object exposed to an interior of the chamber, a source of low-pressure gas, the gas comprising at least one of low-pressure molecular hydrogen gas, low-pressure molecular oxygen and a low-pressure noble gas, the source of low pressure gas being fluidly coupled to the chamber, a low voltage source electrically coupled between the object and a remaining portion of the instrument that is exposed to the interior of the chamber so as to maintain the object at a low voltage relative to the remaining portion, and an EUV/VUV light source adapted to direct EUV/VUV light through the low pressure gas in the chamber onto the object. In such a system, when the EUV/VUV light source is activated ions of the low-pressure gas are formed and directed to the object. The ions may be ions of Hydrogen, Oxygen or a noble gas.

Growing community of inventors

Albuquerque, NM, United States of America

Jeromy T Hollenshead