International Business Machines Corporation

Jerome Paul Silverman

Raul E Acosta

Raman Gobichettipalayam Viswanathan

Alexander L Flamholz

Robert P Rippstein

Matthew A Thompson

An inventive mirror system for use in providing reflected X-ray radiation to a mask having pattern areas and opaque areas, comprising a plurality of parallel mirror segments which are vertically positioned with respect to each other at distances approximately equal to the widths of the corresponding opaque mask areas. In operation, radiation incident on each of the mirror segments is reflected to the patterned feature areas of the mask and skips over the opaque mask areas.

Mirror for providing selective exposure in X-ray lithography

A x-ray scanning method involves the stops of directing an x-ray beam at a collimating first mirror having the capability of altering the source to mirror location and/or grazing angle of incidence. The beam is then reflected from a flat second mirror capable of a scanning motion by linear translation with an optional accompanying angular change in the grazing angle of incidence of the beam on the second mirror.

Growing community of inventors

White Plains, NY, United States of America

Jerome Paul Silverman