Micron Technology Incorporated

International Business Machines Corporation

Lexmark International, Inc.

Jerome Michael Eldridge

Leonard Forbes

Kie Y Ahn

Paul A Farrar

Graham Olive

Francis C Lee

Geraldine C Schwartz

Gary Scott Keller

Cherngye Hwang

Kurt Edward Petersen

Michael H Lee

Andrew M Homola

Alan Stirling Campbell

Wen-yaung Lee

James Hsi-Tang Lee

George N Nelson

Robert C Durbeck

Dean E Eastman

James O Moore

Tiee-Ghow Wang

Lucas S Chang

A method and device for reducing a dopant diffusion rate in a doped semiconductor region is provided. The methods and devices include selecting a plurality of dopant elements. Selection of a plurality of dopant elements includes selecting a first dopant element with a first atomic radius larger than a host matrix atomic radius and selecting a second dopant element with a second atomic radius smaller than a host matrix atomic radius. The methods and devices further include selecting amounts of each dopant element of the plurality of dopant elements wherein amounts and atomic radii of each of the plurality of dopant elements complement each other to reduce a host matrix lattice strain. The methods and devices further include introducing the plurality of dopant elements to a selected region of the host matrix and annealing the selected region of the host matrix.

Apparatus and method for controlling diffusion

A multi-chip electronic package comprised of a plurality of integrated circuit chips secured together in a stack formation. The chip stack is hermetically sealed in an enclosure. The enclosure comprises a pressurized, thermally conductive fluid, which is utilized for cooling the enclosed chip stack. A process and structure is proposed that allows for densely-packed, multi-chip electronic packages to be manufactured with improved heat dissipation efficiency, thus improving the performance and reliability of the multi-chip electronic package.

Multi-chip electronic package and cooling system

A method and device for reducing a dopant diffusion rate in a doped semiconductor region is provided. The methods and devices include selecting a plurality of impurity elements, including at least one dopant element. Selection of a plurality of impurity elements includes selecting a first impurity element with a first atomic radius larger than an average host matrix atomic radius and selecting a second impurity element with a second atomic radius smaller than an average host matrix atomic radius. The methods and devices further include selecting amounts of each impurity element of the plurality of impurity elements wherein amounts and atomic radii of each of the plurality of impurity elements complement each other to reduce a host matrix lattice strain.

Controlling diffusion in doped semiconductor regions

Structures and methods for Flash memory with low tunnel barrier intergate insulators are provided. The non-volatile memory includes a first source/drain region and a second source/drain region separated by a channel region in a substrate. A floating gate opposing the channel region and is separated therefrom by a gate oxide. A control gate opposes the floating gate. The control gate is separated from the floating gate by a low tunnel barrier intergate insulator. The low tunnel barrier intergate insulator includes a metal oxide insulator selected from the group consisting of PbO, AlO, TaO, TiO, ZrO, and NbO. The floating gate includes a polysilicon floating gate having a metal layer formed thereon in contact with the low tunnel barrier intergate insulator. And, the control gate includes a polysilicon control gate having a metal layer formed thereon in contact with the low tunnel barrier intergate insulator.

Flash memory with low tunnel barrier interpoly insulators

Structures and methods for programmable array type logic and/or memory devices with asymmetrical low tunnel barrier intergate insulators are provided. The programmable array type logic and/or memory devices include non-volatile memory which has a first source/drain region and a second source/drain region separated by a channel region in a substrate. A floating gate opposing the channel region and is separated therefrom by a gate oxide. A control gate opposes the floating gate. The control gate is separated from the floating gate by an asymmetrical low tunnel barrier intergate insulator formed by atomic layer deposition. The asymmetrical low tunnel barrier intergate insulator includes a metal oxide insulator selected from the group consisting of AlO, TaO, TiO, ZrO, NbO, SrBiTaO, SrTiO, PbTiO, and PbZrO.

Atomic layer deposition of metal oxide and/or low asymmetrical tunnel barrier interpoly insulators

Atomic layer deposition of metal oxide and/or low asymmetrical tunnel barrier interploy insulators

Atomic layer deposition of metal oxide and/or low assymmetrical tunnel barrier interpoly insulators

Low tunnel barrier insulators

Deposition of metal oxide and/or low asymmetrical tunnel barrier interpoly insulators

Structures and methods for programmable array type logic and/or memory with p-channel devices and asymmetrical low tunnel barrier intergate insulators are provided. The programmable array type logic and/or memory devices include p-channel non-volatile memory which has a first source/drain region and a second source/drain region separated by a p-type channel region in an n-type substrate. A floating gate opposing the p-type channel region and is separated therefrom by a gate oxide. A control gate opposes the floating gate. The control gate is separated from the floating gate by an asymmetrical low tunnel barrier intergate insulator. The asymmetrical low tunnel barrier intergate insulator includes a metal oxide insulator selected from the group consisting of AlO, TaO, TiO, ZrO, NbO, SrBiTaO, SrTiO, PbTiO, and PbZrO. The floating gate includes a polysilicon floating gate having a metal layer formed thereon in contact with the low tunnel barrier intergate insulator. And, the control gate includes a polysilicon control gate having a metal layer, having a different work function from the metal layer formed on the floating gate, formed thereon in contact with the low tunnel barrier intergate insulator.

Programmable array logic or memory with p-channel devices and asymmetrical tunnel barriers

Growing community of inventors

Los Gatos, CA, United States of America

Jerome Michael Eldridge