Commissariat a L'energie Atomique

Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

Mpo International

Jerome Hazart

Salim Boutami

Stephanie Gaugiran

Jean-Jacques Yon

Marc Plissonnier

Ludovic Poupinet

Geoffroy Dumont

Johann Foucher

Ujwol Palanchoke

Fabien Eloi

A computer system processing heterogeneous measurements from various metrology apparatuses includes a processor, a storage, and a software platform. The storage includes a recording of direct models expressing the heterogeneous measurements as a function of predefined features of electronic devices or parameters for processing the measurements. The software platform includes a functional cost calculation module and an interface selecting one of plural cost functions. The functional module provides an estimation of a cost by comparison of the heterogeneous measurements with an estimation of the measurements obtained by an application of the direct models to values of predefined features or processing parameters. The software platform includes a functional solver module and an interface selecting one of plural solvers, for an iterative optimization by the solver of the values based on the output of the cost calculation module and by inversion of the direct models.

Computer system for processing heterogeneous measurements from various metrology apparatuses with a view to estimating values of features of microelectronic devices, corresponding method and computer program

A bolometric detector including an absorption membrane, for converting an incident electromagnetic radiation into heat; and a reflector, for reflecting to the absorption membrane part of the incident electromagnetic radiation having passed there through, is provided. The bolometric detector includes a non-metallic layer, situated between the absorption membrane and the reflector, having a series of index jumps, so as to form a network resonating at a wavelength of interest &#x3bb;; the mean pitch of the network is less than &#x3bb;; and the optical distance between the absorption membrane and the reflector is substantially equal to a multiple of &#x3bb;/2.

Bolometer with high spectral sensitivity

Spectral filtering device including a dielectric substrate, a first filter capable of acting as a passband filter in the visible range and having a plurality of first nanostructures with a uniform spacing between each other. Each nanostructure has a portion of dielectric material arranged between two portions of metallic material such that one of the two portions of metallic material is arranged between the substrate and the portion of dielectric material. A second filter capable of acting as a passband filter in the infrared range is also included having a plurality of second nanostructures with a uniform spacing between each other and each comprising a portion of dielectric material of which only one face is in contact with a portion of metallic material.

Spectral filtering device in the visible and infrared ranges

An irreversible optical recording medium comprises at least an active layer presenting a rear face and a front face designed to receive at least an optical writing radiation. The optical writing radiation enables gas bubbles forming write marks to be formed locally in said active layer by means of a layer forming a gas source arranged on the rear face of the active layer. The layer forming the gas source moreover has a thickness less than or equal to 100 nm so as to limit the height of the bubbles formed in the active layer and therefore to improve tracking when read operations are performed. The layer forming the gas source is preferably made of carbon-doped hydrogenated amorphous silicon oxide.

Irreversible optical recording medium by formation of bubbles having a height limited by the gas source generating them

A structure, decomposable into at least one elementary structure or base element, is illuminated and then provides an optical response, at least one geometrical parameter of the base element is determined, and a value is attributed to it, a regression algorithm is implemented which determines modified values of the parameter(s), in order to make the difference between the theoretical response of the base element and the acquired result at most equal to a threshold, and to obtain an image of the structure, and as long as the separation between the acquired and theoretical responses is not satisfactory, new subdivisions of the base element(s) are performed.

Process of geometrical characterisation of structures and device for implementing said process

A process for moving a particle using a device, the device including a substrate, a wave guide and a grating formed on the wave guide. The process includes injecting light with wavelength &#x3bb; into the wave guide, and diffracting the light transmitted through the guide to a medium with an index nsuper in which the particle is located, particle movement forces being generated by the diffraction of light from the grating.

Particle movement device

A method of optical characterization of a layer of material in which the spectrum of index n* (&#x3bb;) is characterized by a limited number of 'nodes' that are points with coordinates (&#x3bb;, n, k) or (&#x3bb;, n*), with n=n(&#x3bb;), k=k(&#x3bb;) and n*=n+jk, where j, and an interpolation law between the 'nodes,' which can be, for example, linear, cubic, of &#x201c;spline&#x201d; type or polynomial (of any given degree). This interpolation law allows the calculation, from the &#x201c;nodes,&#x201d; of the refraction indexes and the extinction coefficients for the wavelengths located between the &#x201c;nodes.&#x201d;

Method for the optical characterization of materials without using a physical model

This invention relates to a process for moving a particle using a device comprising a substrate (), a wave guide () and a grating () formed on the wave guide, in which:

A method for studying a surface provided with relief features, wherein a measurement spectrum is taken and then compared with test spectra representative of arbitrary structures that are adjusted stepwise. A correlation over representative points of the spectra is selected while optimizing the determination by a hierarchized adjustment of the parameters.

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Grenoble, France

Jerome Hazart