Lehighton Electronics, Inc.

Jerome C Licini

Nikolai Eberhardt

Steven C Murphy

William Zuidervliet

Austin R Blew

Michael Bronko

Danh Nguyen

Michael W Bronko

An apparatus () for contactless measurement of sheet charge density and mobility includes a microwave source (), a circular waveguide () for transmitting microwave power to a sample (), such as a semiconductor wafer or panel for flat panel displays, at a measurement location, a first detector () for detecting the forward microwave power, a second detector () for detecting the microwave power reflected from the sample, and a third detector () for detecting the Hall effect power. An automatic positioning subsystem () is also provided for allowing automatic positioning of a wafer () within the test apparatus (). The positioning system () includes a first end effector () and a rotator-lifter (). The first end effector () can grasp a sheet element () and move it to a desired position within the test apparatus (), while the rotator lifter () provides incremental adjustment of a theta angle of the sheet element () to allow automated mapping of an entire sheet element without the need for manual adjustment of the position of the sheet element. A second end effector () can be mounted opposite the first end effector () and can be used to automatically position the sheet element () within a sheet resistance testing module () located at an opposite end of the apparatus ().

Device and handling system for measurement of mobility and sheet charge density

An apparatus for contactless measurement of sheet charge density and mobility includes a microwave source, waveguide, first, second and third detectors, and an eccentric bore mount for adjusting the sample. A circular waveguide, carrying the TEmode, terminates by the sample behind which a short is located. A magnetic field is applied perpendicular to the plane of the sample, and an incident TEwave causes an ordinary reflected wave and a reflected wave caused by the Hall effect. A first detector measures the ordinary reflected wave, which has the same polarization as the incident wave. A seperate probe measures the reflected wave caused by the Hall effect, whose polarization is perpendicular to the former. This reflected wave is detected, and the output combined with an attenuated; phase shifted, portion of the forward power at a single detector, to eliminate by destructive interference any spurious incident signal at said detector.

Method and apparatus for nondestructive measurement and mapping of sheet materials

An apparatus for contactless measurement of carrier concentration and mobility includes a microwave source, a circular waveguide for transmitting microwave radiation to a sample, such as a semiconductor wafer or panel for flat panel displays, at a measurement location, a first detector for detecting the forward microwave power, a second detector for detecting the microwave power reflected from the sample, and a third detector for detecting the Hall effect power. A circular waveguide, carrying only the TE11 mode, is terminated by the sample behind which a short is located. Perpendicular to the plane of the sample (and along the axis of the circular waveguide), a magnetic field is applied. In this configuration, a given incident TE11 wave will cause two reflected waves. One is the ordinary reflected wave in the same polarization as the incident one. A detector is provided to measure this reflected radiation. The other reflected wave is caused by the Hall effect. Its polarization is perpendicular to the former wave and a probe is provided to detect this as well. This reflected wave is detected by a probe, the output of which is combined with an attenuated and phase shifted portion of the forward radiation at a single detector.

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Macungie, PA, United States of America

Jerome C Licini