Asml Netherlands B.v.

Jeroen Van Duivenbode

Marcus Adrianus Van De Kerkhof

Andrey Alexandrovich Nikipelov

David Ferdinand Vles

Arnoud Willem Notenboom

Bastiaan Lambertus Wilhelmus Marinus Van De Ven

Jim Vincent Overkamp

Willem Joan Van Der Zande

Coen Hubertus Matheus Baltis

Koos Van Berkel

Johannes Adrianus Cornelis Maria Pijnenburg

Peter Michel Silvester Maria Heijmans

Ties Wouter Van Der Woord

Johannes Wilhelmus Damen

Petrus Johannes Van Den Oever

Roger Franciscus Mattheus Maria Hamelinck

Gudrun Ghilaine Agnes De Gersem

Petrus Jacobus Maria Van Gils

Kjeld Gertrudus Hendrikus Janssen

Johannes Bernardus Charles Engelen

Joost Johan Bolder

Henricus Hubertus Adrianus Van Hout

Fabio Sbrizzai

Ruud Hubertus Silvester Vrenken

Dmitry Kurilovich

Erik Johannes Nieuwenhuis

The invention provides a magnet assembly for a planar electromagnetic motor, the magnet assembly comprising: —a first plurality of superconductive (SC) coils, inside an outer circumference and arranged in a planar pattern such as a rectangular pattern, —a second plurality of SC coils, arranged along an outer boundary of the planar pattern, a coil of the first plurality of SC coils having a first in-plane shape and a coil of the second plurality of SC coils having a second in-plane shape, different from the first in-plane shape, wherein the second plurality of SC coils is arranged at least partly inside the outer circumference.

Magnet assembly, coil assembly, planar motor, positioning device and lithographic apparatus

An object holder configured to support an object, the object holder including: a core body comprising a plurality of burls having distal ends in a support plane for supporting the object; and an electrostatic sheet between the burls, the electrostatic sheet comprising an electrode sandwiched between dielectric layers, wherein the electrostatic sheet is bonded to the core body by a bonding material having a thickness of at least 100 nm.

Object holder, tool and method of manufacturing an object holder

A membrane cleaning apparatus for removing particles from a membrane, the apparatus including a membrane support and an electric field generating mechanism. The membrane support is for supporting the membrane. The electric field generating mechanism is for generating an electric field in the vicinity of the membrane when supported by the membrane support. The electric field generating mechanism may include: one or more collector electrodes; and a mechanism for applying a voltage across a membrane supported by the membrane support and the or each of the one or more collector electrodes.

Membrane cleaning apparatus

The invention relates to a motor (LD) comprising: a stationary part (STP), comprising: a row of coil assemblies (UCA,LCA), the coil assemblies having multiple phases, a movable part (MP), comprising: a row of permanent magnets (UPM,LPM), wherein the row of coil assemblies has a first length and the row of permanent magnets has a second length, wherein the second length is smaller than the first length, wherein the coil assemblies are arranged to interact with permanent magnets aligned with the coil assemblies to generate a driving force, a comparator to compare a position measurement signal representative for an actual position of the movable part with a set-point signal representative for a desired position of the movable part to provide an error signal; a motion feedback controller configured to provide a control signal on the basis of the error signal; at least one current amplifier configured to provide an actuation signal to the coil assemblies on the basis of the control signal, wherein the motor comprises a feedforward device, wherein the feedforward device is configured to provide a current amplifier feedforward signal on the basis of the set-point signal, or a derivative thereof, wherein the current amplifier feedforward signal is provided to the at least one current amplifier to compensate for unbalanced back electromotive forces on one or more of the coil assemblies due to the one or more coil assemblies being only partly aligned with the permanent magnets.

Motor, dual stroke stage and lithographic apparatus

An apparatus for removing particles from a clamp, the apparatus being arrangeable in proximity of the clamp and comprising an insulating portion, a supporting portion, at least a part or all of the insulating portion being arranged on the supporting portion, wherein the supporting portion is configured such that when a voltage is applied to the supporting portion of the apparatus and/or to an electrode of the clamp, the supporting portion acts as an electrode to allow an electric field to be generated between the apparatus and the clamp for removal of the particles from the clamp.

Particle removal apparatus and associated system

An electrical connector suitable, for example, for connecting high voltage carrying cables in a low pressure environment comprises a housing having a conducting surface and a plurality of cable insertion parts, each cable insertion part comprising an electrical conductor configured to connect to an electrical cable and an insulating sleeve surrounding the electrical conductor, wherein the housing surrounds the plurality of cable insertion parts.

Electrical connector for lithographic projection apparatus

Growing community of inventors

Veldhoven, Netherlands

Jeroen Van Duivenbode