Average Co-Inventor Count = 13.64
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Asml Netherlands B.v. (3 from 4,899 patents)
3 patents:
1. 11846887 - Prolonging optical element lifetime in an EUV lithography system
2. 11340532 - Prolonging optical element lifetime in an EUV lithography system
3. 8435593 - Method of inspecting a substrate and method of preparing a substrate for lithography