Canon Kabushiki Kaisha

Jeremy Sevier

Byung-Jin Choi

Mario Johannes Meissl

Philip D Schumaker

Seth J Bamesberger

A head module of an imprint lithography system includes a base, a control body coupled to the base, a first set of actuators configured to generate a first force to translate the control body relative to the base along a first axis and to rotate the control body relative to the base about a second axis perpendicular to the first axis and about a third axis perpendicular to the first axis and to the second axis, a second set of actuators configured to generate a second force to translate the control body relative to the base in a plane defined by the second axis and the third axis and to rotate the control body relative to the base about the first axis, and a flexure coupling the base and the control body and restricting translation and rotation of the control body with respect to the base.

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Austin, TX, United States of America

Jeremy Sevier