Parker-hannifin Corporation

Jeremy Payne

Kenneth W Cornett

Dominick Greg More

Amitava Datta

Paul A Dudzinski

Douglas Schenk

Stephen J Coppola

Peter Graham Amos

Julian Kamibayashiyama

Hai-Ping Ma

Dan Funke

James E Beach

Don Bowman

Jeff Navarro

Donald J Peterson

A metallic seal design that reduces manufacturing costs by minimizing production steps and also lowers the sealing force by incorporating a thin-wall, high height/width ratio annular column. The seal has two horizontal ribs which constrain the thin-wall column from unstable buckling to thereby reduce or eliminate the tendency of the sealing dams to become inclined to sealing flange surfaces.

Ultra-high vacuum metallic seal

A seal for sealing an interface between a container and a lid of a process chamber. The seal comprises a first seal element and a second seal element that are arranged to seal the interface in series, with the second seal element being situated to encounter processing activity upstream of the fist seal element. The first seal element has a deflectable portion and a protrusion extending radially from the deflectable portion. The second seal element has a radially extending recess in which the protrusion of the first seal element is received. The protrusion and recess interlock to restrict separation and/or rotation of the first and second seal elements. Inclined surfaces of the first seal element interact with the second seal element to apply axial sealing forces to sealing surfaces of the second seal member.

Substrate processing apparatus with composite seal

A composition and process for forming an electrodeposited coating comprising a co-deposit of a metal and MCrAlY particles. The composition includes a metal and a MCrAlY particles, and the electrodeposited coating comprises a metal matrix and MCrAlY particles dispersed in the matrix. In one aspect, a coating is provided that exhibits excellent oxidation resistance and tribological characteristics at high temperatures, including up to at least about 1350&#xb0; F. A high temperature coating may comprise a nickel/cobalt alloy matrix comprising MCrAlY particles and chromium carbide particles dispersed in the nickel/cobalt matrix.

Protective coating for metallic seals

An engine exhaust system comprises duct pieces and a thermally expandable sealing joint for interconnecting their adjoining ends. The sealing joint comprises a tubular body including a first axial end portion, a second axial end portion, and a bridge portion extending therebetween. The first end portion is at least partially positioned within a female recess of the first duct piece and the second end portion is at least partially positioned with a female recess of the second duct piece. The bridge portion can extend across a gap and/or it can be positioned partially within female recesses. Upon thermal activation, the sealing joint radially expands permanently to engage the inner radial surfaces of the duct pieces.

Sealing joint for connecting adjoining duct pieces in an engine exhaust system

An engine exhaust system comprises duct pieces () and a sealing joint () for interconnecting their adjoining ends. The sealing joint () comprises a one-piece tubular body () including a first axial end portion (), a second axial end portion (), and a bridge portion () extending therebetween. The first end portion () is at least partially positioned within a female recess () of the first duct piece () and the second end portion () is at least partially positioned within a female recess () of the second duct piece (). Depending upon the thermal expansion-contraction conditions in the exhaust system, the bridge portion () can extend across a gap () and/or it can be positioned partially within female recesses () and ().

A process chambercomprising a container (), a lid (), and a sealed interface () therebetween. The container's interface surface () and/or the lid's interface surface () includes at least one groove () in which a seal () is situated. The seal () comprises an elastomeric element () and a metallic element (). The elastomeric element () and the metallic element () can be arranged and adapted to seal the chamber's interface () sequentially during its conversion to a sealed condition. And/or the elastomeric element () and the metallic element () can be arranged and adapted to seal the chamber's interface in series once the lid () is in its sealed condition.

Semiconductor process chamber

A spring seal for sealing in high temperature applications includes a jacket and a spring member disposed within the jacket. The spring member is constructed to control a sealing load or spring rate of the spring seal relative to opposing flanges while the jacket is constructed to provide a sealing surface relative to the opposing flanges. The spring member is manufactured from a cast blade alloy, thereby allowing the spring member to maintain its spring back characteristics at relatively high temperatures of about 1300&#xb0; F. and greater. Accordingly, the spring member minimizes the formation of a leak path between the spring seal and the opposing flanges. In one embodiment, the spring member is manufactured with a substantially U-shaped cross-section. With such a configuration, the spring seal provides substantially balanced, opposing forces on the jacket to minimize the formation of gaps between the spring seal and the flanges.

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New Haven, CT, United States of America

Jeremy Payne