Case Western Reserve University

The United States Government As Represented by the Department of Veterans Affairs

Flx Micro, Inc.

Jeremy L Dunning

Joseph A Potkay

Katherine M Bogie

Mehran Mehregany

Christian A Zorman

Steve J A Majerus

Xiao-An Fu

Steve Majerus

A sensor apparatus includes at least one substrate layer of an elastically deformable material, the substrate layer extending longitudinally between spaced apart ends thereof. A conductive layer is attached to and extends longitudinally between the spaced apart ends of the at least one substrate layer. The conductive layer includes an electrically conductive material adapted to form a strain gauge having an electrical resistance that varies based on deformation of the conductive layer in at least one direction.

Method for generating one or more strain measurements associated with a biological surface

Sensor apparatus and method of making same

Conductive layer formed strain gauge and method of making same

A method of depositing a ceramic film, particularly a silicon carbide film, on a substrate is disclosed in which the residual stress, residual stress gradient, and resistivity are controlled. Also disclosed are substrates having a deposited film with these controlled properties and devices, particularly MEMS and NEMS devices, having substrates with films having these properties.

Composition comprising silicon carbide

Silicon carbide and other films and method of deposition

Growing community of inventors

Berea, OH, United States of America

Jeremy L Dunning