Corning Incorporated

Jeremy Curtis Clark

Robert Alan Bellman

Paul Arthur Sachenik

Lili Tian

Lynn Bernard Simpson

Disclosed are AZO films deposited on a transparent substrate by pulse DC using an oxide target with a composition in the range 0.5-2 wt % AlO, desirably at temperature above 325&#xb0; C., resulting in films showing columnar grain structure with columns extending from the top to the bottom of the film, and small lateral grain size (less than 70 nm from substrate to top of film). The film has low resistivity at less than 10 Ohm/square at a thickness less than 400 nm, resistivity is desirably unchanged by annealing at temperatures of up to 450&#xb0; C.

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Addison, NY, United States of America

Jeremy Curtis Clark