Hrl Laboratories, LLC

Jeremy Bregman

Raviv Perahia

Logan D Sorenson

Lian X Huang

Amit Madanlal Patel

Sean M Meenehan

David T Chang

Makena S White

A resonator has a resonator body and a frame at least partially surrounding the resonator body, the resonator body being coupled to the frame by at least one tether. The resonator body, frame and at least one tether comprise silicon carbide. A plurality of interdigitated electrodes are disposed on the silicon carbide resonator body. The resonator body preferably comprises 6H silicon carbide and preferably has a crystalline c-axis oriented generally parallel to a thickness direction of the resonator body.

Piezoelectric single crystal silicon carbide microelectromechanical resonators

A method of making a SiC resonator includes forming a layer of an oxide material on a relatively thick wafer of SiC; bonding the layer of oxide material on the relatively thick wafer of SiC to a handle wafer having at least an oxide exterior surface, the resulting bond being substantially free of voids; planarizing the relatively thick wafer of SiC to a desired thickness; forming top and bottom electrodes on the wafer of SiC wafer to define a SiC wafer resonator portion; and forming a trench around the top and bottom electrodes, the tench completely penetrating the planarized wafer of SiC around a majority of a distance surrounding said top and bottom electrodes, except for one or more tether regions of the planarized wafer of SiC which remain physically coupled a remaining portion the SiC wafer resonator portion which defines a frame formed of the planarized wafer of SiC surrounding the SiC wafer resonator portion.

Method of fabricating a SiC resonator

A curved phononic waveguide. In some embodiments, the curved phononic waveguide includes a sheet including a plurality of standard reflectors and a plurality of divergent reflectors. Each of the standard reflectors is associated with a respective grid point of a grid defined by a plurality of intersecting lines, each grid point being a respective intersection of two of a plurality of intersecting lines, the grid being locally periodic to within 5%, and having a local grid spacing. Each of the standard reflectors has a center separated from the respective grid point of the standard reflector by at most 1% of the grid spacing. The divergent reflectors define a waveguide among the standard reflectors, each of the divergent reflectors being an absent reflector or a reflector that is smaller than one of the standard reflectors.

Curved phononic crystal waveguide

A phononic coupler. In some embodiments, the phononic coupler includes a sheet, including a plurality of standard reflectors, and a plurality of divergent reflectors. The divergent reflectors define, among the standard reflectors, a first waveguide, and a second waveguide. The coupler has a first port, at a first end of the coupler, a second port, at the first end of the coupler, and a third port, at a second end of the coupler. The first waveguide has a first end at the first port. The second waveguide has a first end at the second port, and a second end at the third port. The coupler is configured to couple longitudinal sound waves to both the first port and the second port.

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Malibu, CA, United States of America

Jeremy Bregman