Microsoft Technology Licensing, LLC

Massachusetts Institute of Technology

Jeremy A Levitan

Michael Jack Sinclair

Martin Zdenek Bazant

Neil Adam Gershenfeld

Ernesto E Blanco

Todd A Thorsen

Martin Arnold Schmidt

Yuxing Ben

John-Paul Urbanski

A microelectrical mechanical system (MEMS) actuator having electrically conductive coils that create first magnetic fields that are opposed by a second magnetic field is disclosed. The actuator includes two coils having dual, interspersed Archimedean spirals. Within an actuator, one coil is arranged with spirals that proceed clockwise, while the other coil is provided with spirals that proceed counterclockwise. An electrically conductive bridge mechanically couples the two coils of each actuator to a mirror. Opposing magnetic fields are created to provide a force that urges the coils to expand so that the outermost portions of the coil extend upward, away from the substrate, and lift the bridge and mirror. Control current may then be modulated to increase and decrease the coil's magnetic field strength thereby increasing and decreasing the coil's extension to raise and lower relative to the substrate.

Magnetically actuated microelectromechanical systems actuator

This invention provides devices and apparatuses comprising the same, for efficient pumping and/or mixing of relatively small volumes of fluid. Such devices utilize nonlinear electrokinetics as a primary mechanism for driving fluid flow. Methods of cellular analysis and high-throughput, multi-step product formation using devices of this invention are described.

Induced-charge electro-osmotic microfluidic devices

This invention provides devices and apparatuses comprising the same, for the mixing and pumping of relatively small volumes of fluid. Such devices utilize nonlinear electrokinetics as a primary mechanism for driving fluid flow. Methods of cellular analysis and high-throughput, multi-step product formation using, devices of this invention are described.

Microfluidic pumps and mixers driven by induced-charge electro-osmosis

Magnetically actuated microelectrochemical systems actuator

A fuse array having a plurality of fusible links that can be addressed by two electrodes is disclosed. The fuse array includes two conductive strips having the plurality of fusible links located therebetween and electrically coupled to the conductive strips. The fusible links have different electrical resistance and each fusible link includes a fuse portion. A voltage potential applied across the conductive strips induces current flow through the fusible links in accordance with Ohm's law and ohmic heating occurs at the fuse portion in proportion to the square of the current. The voltage is increased to cause sufficient ohmic heating to occur in the most conductive fusible link (the fusible link having the lowest electrical resistance) so that the fuse portion in that fusible link fuses. Because the fusible links are connected in parallel to the conductive strips, an equivalent resistance of the plurality of fusible links increases and the current flow diminishes so that no further fuse portions are fused at the selected voltage level. Thereafter, the voltage level may be increased to fuse the most conductive fusible link remaining that is not fused. The fuse array may be incorporated into a circuit as a resistor that can be tuned to circuit requirements or as a physical structure in MEMS devices wherein the fuse array may be tuned to change physical properties of the MEMS device.

Addressable fuse array for circuits and mechanical devices

A microelectrical mechanical systems actuator that provides a long throw is disclosed. The actuator includes a drive mechanism that oscillates a pallet that is located between leg portions of a drive member. The pallet includes first and second rows of pallet teeth located along two opposite edges of the pallet. The drive member is slideably coupled to a substrate, and includes first and second rows of drive teeth that are located along two opposing drive margins of the drive member leg portions. The pallet teeth and the drive teeth are compatible so as to permit meshing engagement of the pallet teeth with the drive teeth. The pallet is arranged between the rows of drive teeth. When the pallet teeth are meshingly misaligned with respective drive teeth and the pallet is urged against the drive margin, the drive member is forced to move until the teeth meshingly engage. By arranging the pallet and drive teeth so that first and second respective sets of pallet and drive teeth can not simultaneously be in meshing alignment, the drive member may be incrementally moved by oscillating the pallet edges between the first and second drive margins. The shape of the pallet and drive teeth may be selected to control a step size of the movement increment and the force applied. Further, the pallet and drive teeth may be arranged so as to provide movement in one direction or two directions.

Microelectromechanical system actuator for extended linear motion

In a hydraulic or pneumatic flow-control valve, the valve stem itself is made a part of a solenoid arrangement that effects its reciprocation. The valve stem is magnetically responsive (e.g., magnetically permeable or ferromagnetic), and a magnetic field is applied to the stem to cause it to move within the bore of the valve housing; there is no external element required to urge the valve stem into movement. The valve stem is typically sealed permanently within the bore.

Transmissionless pressure-control valve

Moving a panel on a microelectromechanical system by generating a magnetic force that acts on the panel is disclosed. The panel is formed on, or coupled to, a substrate so as to be able to move between first and second positions. The panel includes an electrically conductive region, such as a metallic ring or sheet, or a doped polysilicon layer. An electrical coil is also located on the substrate and coupled to a power source that can generate time-varying current. When a time-varying current is conducted through the coil, a magnetic flux is generated in the coil that induces an electromotive force (emf) in the panel that, in turn, generates a magnetic flux having a direction that is opposite the magnetic flux in the coil. The opposing magnetic fluxes create a repulsive magnetic force that urges the panel to move away from the coil. A flat spring is provided to hold the panel in a desired position and provide a drag force on the panel as it moves.

Growing community of inventors

Cambridge, MA, United States of America

Jeremy A Levitan