Advanced Micro Devices Corporation

Cypress Semiconductor Corporation

Spansion Llc.

Jeremias D Romero

Paul Raymond Besser

Lu You

Pin-Chin Connie Wang

Minh Quoc Tran

Sergey D Lopatin

Matthew S Buynoski

Wen Yu

Roger L Alvis

Homi Fatemi

Alline F Myers

Stephen B Robie

Suzette Keefe Pangrle

Andrew Norman Erickson

Bryan M Tracy

Eugene A Delenia

Robert Matthew Ulfig

Ayesha R Kizchery

Muhib M Khan

The present method of forming an electronic structure includes providing a tantalum base layer and depositing a layer of copper on the tantalum layer, the deposition being undertaken by physical vapor deposition with the temperature of the base layer at 50.degree. C. or less, with the deposition taking place at a power level of 300 W or less.

Method of depositing copper using physical vapor deposition

The present method of forming an electronic structure includes providing a tantalum base layer and depositing a layer of copper on the tantalum layer, the deposition being undertaken by physical vapor deposition with the temperature of the base layer at 50&#xb0; C. or less, with the deposition taking place at a power level of 300 W or less.

An exemplary embodiment is related to a method of using an adhesion precursor in an integrated circuit fabrication process. The method includes providing a gas of material over a dielectric material and providing a copper layer over an adhesion precursor layer. The adhesion precursor layer is formed by the gas, and the dielectric material includes an aperture.

Method of using an adhesion precursor layer for chemical vapor deposition (CVD) copper deposition

A method for manufacturing an integrated circuit having improved electromigration characteristics includes forming an aperture in an interlevel dielectric layer and providing a barrier layer in the aperture. The aperture is filled with a metal material and a barrier layer is provided above the metal material. An intermetallic region can be formed at an interface of the metal material and the barrier layer. The intermetallic material can be formed by implantation of species.

Implanted barrier layer to improve line reliability and method of forming same

A method for measuring porosity of nanoporous materials is provided using atomic force microscopy (AFM). A surface topology map with sub-atomic resolution is created using AFM wherein the pore shape and size can be determined by measuring the pores that intersect the top or fracture surface. For porous materials requiring more accurate measurements, small scan areas with slow scan speed and fine AFM tips are used and a general estimation on distribution can be made from a sample area.

Method for determining pore characteristics in porous materials

A method of forming a metal or metal nitride layer interface between a copper layer and a silicon nitride layer can include providing a metal organic gas or metal/metal nitride precursor over a copper layer, forming a metal or metal nitride layer from reactions between the metal organic gas or metal/metal nitride precursor and the copper layer, and depositing a silicon nitride layer over the metal or metal nitride layer and copper layer. The metal or metal nitride layer can provide a better interface adhesion between the silicon nitride layer and the copper layer. The metal layer can improve the interface between the copper layer and the silicon nitride layer, improving electromigration reliability and, thus, integrated circuit device performance.

Method of forming a metal or metal nitride interface layer between silicon nitride and copper

A diode is formed at the tip of a pointed portion of a probe of a scanning probe microscope. When the diode is forward biased, the current through the diode varies with the temperature of the diode. The magnitude of the current is an indication of the temperature of the tip of the probe. If the tip is scanned over a surface, a thermal map of the surface can be made and hot spots on the surface located. In some embodiments, the pointed portion of the probe is made of a semiconductor material (for example, silicon). A layer of a metal (for example, platinum) is made to contact the semiconductor material of the pointed portion only at the tip of the pointed portion, thereby forming a very small temperature sensing Schottky diode at the tip of the pointed portion.

Temperature sensing probe for microthermometry

A method of accurately determining the composition of a dielectric film in a semiconductor device by performing a compositional analysis on a film only portion of the semiconductor device.

Method of accurate compositional analysis of dielectric films on

An improved process is provided for forming a multilayer structure (18) suitable for tape automated bonding thereto or for forming contacts. In the process, a first layer (12) of aluminum is formed on a substrate (10), a second layer (14) of a TiW alloy is formed on the first layer of aluminum, and a third layer (16) of gold is formed on the second layer of the TiW alloy, to which third layer of gold bonding is done. The improvement comprises annealing the second layer of the TiW alloy in an inert atmosphere at a temperature less than about 500.degree. C. for a period of time sufficient to form a film of an Al--TiW phase (20), believed to comprise TiAl.sub.3, at the interface between the first layer of aluminum and the second layer of the TiW alloy. The annealing is done prior to forming the third layer of gold on the second layer of the TiW alloy.

Growing community of inventors

Hayward, CA, United States of America

Jeremias D Romero