Average Co-Inventor Count = 6.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Lam Research Corporation (2 from 3,785 patents)
2 patents:
1. 6261155 - Method and apparatus for in-situ end-point detection and optimization of a chemical-mechanical polishing process using a linear polisher
2. 6146248 - Method and apparatus for in-situ end-point detection and optimization of