Mks Instruments, Inc.

Jeongseok Jang

David J Coumou

Jin Huh

Dennis M Brown

Hohyoung Lee

Jaechul Jung

Dinh-Vuong Le

Ngoc-Hung Nguyen

A RF power generator has a RF power source configured to generate an output signal. A power splitter is configured to receive the output signal and generate a plurality of split signals. A demagnetizing circuit is configured to receive the plurality of split signals. The demagnetizing circuit is configured to include a plurality of inductances corresponding to the plurality of split signals. The plurality of inductances is configured to reduce the effects of mutual impedance of an ICP chamber in series with the plurality of inductances so that a ratio between a pair of the plurality of split signals varies substantially linearly as one of the pair of the plurality of split signals is varied.

Demagnetizing coils for linearity improvement of current ratio of plasma processing systems

A single input multiple output plasma control system includes a splitter that receives a single input and generates multiple outputs. Each output from the splitter is provided to a load. The splitter includes branch circuits connected between selected splitter outputs. The branch circuits control voltage, current, power, frequency, or phase between each branch to enable controlling a predetermined relationship between the voltage, current, power, impedance, frequency, or phase measured at each load.

Balancing RF circuit and control for a cross-coupled SIMO distribution network

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Seoul, South Korea

Jeongseok Jang